The ultraviolet laser micro-processing system was self-developed. Effective working area of the system was 120 mm x120 mm and its minimum linewidth was 80 μm. The Nd∶YAG ultraviolet laser,XY shake lens and F-Theta lens were designed,and ultraviolet laser in 355 nm with maximum average output power of 2.13 W was achieved with the power fluctuation less than 7% in 1 h. The maximum scan angle of XY shake lens was ±28°,and response speed was less than 0.35～0.5 ms. The field angle of the F-Theta lens was ±25°,and focal length was 250 mm. In the end,some problem in the system was analyzed.