Studies on the Micro-Structure and Laser Damage Threshold of ZrO2 Thin Films Deposited at Different Parameters

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 25 >Issue 7 >Page 994 > Article

Acta Optica Sinica
Vol. 25, Issue 7, 994 (2005)

Studies on the Micro-Structure and Laser Damage Threshold of ZrO₂ Thin Films Deposited at Different Parameters

[in Chinese]^1、2、*, [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]¹, and [in Chinese]¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Studies on the Micro-Structure and Laser Damage Threshold of ZrO₂ Thin Films Deposited at Different Parameters[J]. Acta Optica Sinica, 2005, 25(7): 994 Copy Citation Text

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References

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[2] Peifu Gu, Jinfa Tang. Excimer laser reflectors[C]. Proc. SPIE, 1989, 1166: 533～541

[3] Z. X. Fan, R. Y. Fan, X. F. Tang. Ion assited deposition of optical coatings[C]. Proc. SPIE, 1996, 2714: 360～363

[4] Jianping Hu, Ping Ma, Qiao Xu et al.. Effect of λ/2 SiO2 overcoat on the laser damag of HfO2/SiO2 high-reflector coatings[J]. Chin. Opt. Lett., 2003, 1(6): 340～342

[5] R. Guinebretiere, B. Soulestin, A. Dauger. XRD and TEM study of heteroepitaxial growth of zirconia on magnesia single crystal[J]. Thin Solid Films, 1998, 319: 197～201