• Frontiers of Optoelectronics
  • Vol. 2, Issue 1, 113 (2009)
Xiaoyan WANG1、2、*, Xiaoliang WANG1、2, Baozhu WANG1、2, Junxue RAN1、2, Hongling XIAO1、2, Cuimei WANG1、2, and Guoxin HU1、2
Author Affiliations
  • 1Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Material Science Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
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    DOI: 10.1007/s12200-009-0006-z Cite this Article
    Xiaoyan WANG, Xiaoliang WANG, Baozhu WANG, Junxue RAN, Hongling XIAO, Cuimei WANG, Guoxin HU. AlxGa1-xN solar-blind photodetectors grown by low pressure MOCVD[J]. Frontiers of Optoelectronics, 2009, 2(1): 113 Copy Citation Text show less

    Abstract

    AlxGa1-xN ternary alloys are very attractive materials for application to ultraviolet (UV) photodetection. In this work, high Al content AlxGa1-xN films are grown on sapphire substrate by low pressure metalorganic chemical vapor deposition (MOCVD). The Al content in the AlxGa1 - xN epilayer is estimated to be 54% by high resolution X-ray diffraction (HRXRD) and Vegard’s law. The full width at half maximum (FWHM) of the rocking curve for the Al0.54Ga0.46N (0002) is about 597 arcsec. According to the transmittance measurement result, our sample is suitable for fabricating solar-blind photodetectors. The observed Fabry-Perot fringes in the transmission region indicate that high optical quality is obtained. Solarblind metal-semiconductor-metal (MSM) photodetectors based on the MOCVD-grown Al0.54Ga0.46N film are fabricated and tested. The detector has a low dark current of about 31 pA under a bias voltage of 5 V. An UV/visible contrast of about four orders of magnitude is observed and responsivity increases with increments of the bias voltage.
    Xiaoyan WANG, Xiaoliang WANG, Baozhu WANG, Junxue RAN, Hongling XIAO, Cuimei WANG, Guoxin HU. AlxGa1-xN solar-blind photodetectors grown by low pressure MOCVD[J]. Frontiers of Optoelectronics, 2009, 2(1): 113
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