• Laser & Optoelectronics Progress
  • Vol. 51, Issue 2, 22302 (2014)
Yang Guofeng*, Zhu Huaxin, Guo Ying, Li Guohua, and Gao Shumei
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/lop51.022302 Cite this Article Set citation alerts
    Yang Guofeng, Zhu Huaxin, Guo Ying, Li Guohua, Gao Shumei. Study on the Growth of InGaN/GaN Multiple Quantum Wells on GaN {11-22} Semipolar Plane[J]. Laser & Optoelectronics Progress, 2014, 51(2): 22302 Copy Citation Text show less

    Abstract

    Selective area epitaxy is applied to grow GaN {11-22} semipolar plane template, followed by InGaN/GaN multiple quantum wells (MQWs) growth. The results indicate that the GaN template is composed of the {11-22} side facet and planer c plane, and the MQWs show dual-color emission. Local cathodoluminescence reveals that the 390 nm emission peak originates from the MQWs on semipolar plane, while the 400 nm emission peak results from the MQWs on c plane. The large red-shift in emission wavelength for c plane MQWs compared with that of {11-22} semipolar plane MQWs is due to the indium enrichment originating from additional source supply due to the surface migration effect and lateral vapor-phase diffusion during selective area epitaxy. Another important reason is the reduced polarization effect InGaN/GaN MQWs on semipolar plane. At the same time, the growth rate of the semipolar plane is lower than that of the polar c plane under the same conditions.
    Yang Guofeng, Zhu Huaxin, Guo Ying, Li Guohua, Gao Shumei. Study on the Growth of InGaN/GaN Multiple Quantum Wells on GaN {11-22} Semipolar Plane[J]. Laser & Optoelectronics Progress, 2014, 51(2): 22302
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