Researching

Journals
  • Advanced Photonics
  • Photonics Insights
  • Advanced Photonics Nexus
  • Photonics Research
  • Advanced Imaging
  • View All Journals
  • Chinese Optics Letters
  • High Power Laser Science and Engineering
    • Articles
  • Optics
  • Physics
  • Geography
  • View All Subjects
    • Conferences
  • CIOP
  • HPLSE
  • AP
  • View All Events
    • News
    About CLP
    Search by keywords or author
    Journals >Opto-Electronic Engineering >Volume 40 >Issue 7 >Page 39 > Article
    • Opto-Electronic Engineering
    • Vol. 40, Issue 7, 39 (2013)
    Design and Analysis for the High-precision Lens Flexible Structure of Lithography Objective Lens
    HUA Yangyang* and GONG Yan
    Author Affiliations
  • [in Chinese]
    • show less
    DOI: 10.3969/j.issn.1003-501x.2013.07.007 Cite this Article
    HUA Yangyang, GONG Yan. Design and Analysis for the High-precision Lens Flexible Structure of Lithography Objective Lens[J]. Opto-Electronic Engineering, 2013, 40(7): 39 Copy Citation Text show less
    References
    Abstract
    Get PDF
    Figures&Tables (0)
    Equations (0)
    References (0)
    Get Citation
    Copy Citation Text
    HUA Yangyang, GONG Yan. Design and Analysis for the High-precision Lens Flexible Structure of Lithography Objective Lens[J]. Opto-Electronic Engineering, 2013, 40(7): 39
    Download Citation
    Tools
    Share
    Save the article for my favorites
    Paper Information
    Recommended Topics
    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology