[1] LI Feng-you,LU Zhen-wu,XIE Yong-jun,et al. Laser direct writing system with cartesian and polar coordinate [J]. Acta Photonica Sinica,2002,31(5): 616-619.
[4] YANG Guo-guang,SHEN Yi-bing. Research on laser direct writing system and its lithography properties [J]. SPIE,1998,3550: 409-418.