• Infrared and Laser Engineering
  • Vol. 51, Issue 9, 20220456 (2022)
Deyan Zhu1,2, Junwei Tang1,2, Chengli Guo3, Yuanzheng Li3, and Liefeng Zhao3
Author Affiliations
  • 1Aerospace Institute, Nanjing University of Aeronautics and Astronautics, Nanjing 211106, China
  • 2Key Laboratory of Space Photoelectric Detection and Perception (Nanjing University of Aeronautics and Astronautics), Ministry of Industry and Information Technology, Nanjing 211106, China
  • 3Zhejiang Sunny Optical Company, Yuyao 315400, China
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    DOI: 10.3788/IRLA20220456 Cite this Article
    Deyan Zhu, Junwei Tang, Chengli Guo, Yuanzheng Li, Liefeng Zhao. Interferometric testing of convex freeform surface in industrial lens based on Computer-Generated-Hologram (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220456 Copy Citation Text show less
    Layout of convex freeform surface interferometric testing by CGH
    Fig. 1. Layout of convex freeform surface interferometric testing by CGH
    Requirements for interference testing of convex surfaces
    Fig. 2. Requirements for interference testing of convex surfaces
    Deviation between freeform and best fitting spheric surface
    Fig. 3. Deviation between freeform and best fitting spheric surface
    Design result of main section. (a) Optical layout; (b) Wavefront aberration
    Fig. 4. Design result of main section. (a) Optical layout; (b) Wavefront aberration
    Isophase surface of main region
    Fig. 5. Isophase surface of main region
    Design result of alignement section
    Fig. 6. Design result of alignement section
    Regional distribution of CGH
    Fig. 7. Regional distribution of CGH
    Separation results of diffraction order. (a) Optical layout; (b) Separation results
    Fig. 8. Separation results of diffraction order. (a) Optical layout; (b) Separation results
    Surface-shape error by tolerances. (a) 1 μm errors in x direction; (b) 1 μm errors in y direction; (c) 1 μm errors in z direction; (d) 1" errors in x direction; (e) 1" errors in y direction; (f) 1" errors in z direction
    Fig. 9. Surface-shape error by tolerances. (a) 1 μm errors in x direction; (b) 1 μm errors in y direction; (c) 1 μm errors in z direction; (d) 1" errors in x direction; (e) 1" errors in y direction; (f) 1" errors in z direction
    Experiment of testing. (a) Optical layout of experiment; (b) CGH
    Fig. 10. Experiment of testing. (a) Optical layout of experiment; (b) CGH
    Testing result of freeform surface. (a) Interferometry; (b) Profile measurement
    Fig. 11. Testing result of freeform surface. (a) Interferometry; (b) Profile measurement
    ParameterValue
    Radius of curvature R/mm kRex/mm Rey/mm x axis decenter/mm y axis decenter/mm Z4Z6Z8Z10Z12−1.04e+002 0 50/2 50/2 0 −5 −2.74e-007 2.62e-011 7.11e-015 −3.45e-016 4.58e-019
    Table 1. Parameters of freeform surface
    TolerancesValue
    Decenter x/μmDecenter y/μm Decenter z/μm Tilt x/(")Tilt y/(") Tilt z/(") 5 5 5 5 5 5
    Table 2. Position and orientation tolerances of CGH
    Deyan Zhu, Junwei Tang, Chengli Guo, Yuanzheng Li, Liefeng Zhao. Interferometric testing of convex freeform surface in industrial lens based on Computer-Generated-Hologram (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220456
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