Deyan Zhu, Junwei Tang, Chengli Guo, Yuanzheng Li, Liefeng Zhao. Interferometric testing of convex freeform surface in industrial lens based on Computer-Generated-Hologram (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220456

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- Infrared and Laser Engineering
- Vol. 51, Issue 9, 20220456 (2022)

Fig. 1. Layout of convex freeform surface interferometric testing by CGH

Fig. 2. Requirements for interference testing of convex surfaces

Fig. 3. Deviation between freeform and best fitting spheric surface

Fig. 4. Design result of main section. (a) Optical layout; (b) Wavefront aberration

Fig. 5. Isophase surface of main region

Fig. 6. Design result of alignement section

Fig. 7. Regional distribution of CGH

Fig. 8. Separation results of diffraction order. (a) Optical layout; (b) Separation results

Fig. 9. Surface-shape error by tolerances. (a) 1 μm errors in x direction; (b) 1 μm errors in y direction; (c) 1 μm errors in z direction; (d) 1" errors in x direction; (e) 1" errors in y direction; (f) 1" errors in z direction

Fig. 10. Experiment of testing. (a) Optical layout of experiment; (b) CGH

Fig. 11. Testing result of freeform surface. (a) Interferometry; (b) Profile measurement
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Table 1. Parameters of freeform surface
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Table 2. Position and orientation tolerances of CGH

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