• Journal of Infrared and Millimeter Waves
  • Vol. 34, Issue 6, 658 (2015)
ZHANG Ying1, WEI Shen-Jin1, YI Xin-Yu1, CHENG Shuai1, CHEN Kun1, ZHU Huan-Feng1, LI Jing1、2、3、*, and LV Lei4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: 10.11972/j.issn.1001-9014.2015.06.004 Cite this Article
    ZHANG Ying, WEI Shen-Jin, YI Xin-Yu, CHENG Shuai, CHEN Kun, ZHU Huan-Feng, LI Jing, LV Lei. Improvement of phase change behavior in titanium-doped Ge2Sb2Te5 films[J]. Journal of Infrared and Millimeter Waves, 2015, 34(6): 658 Copy Citation Text show less

    Abstract

    The influence of Ti dopant in the titanium-doped Ge2Sb2Te5 film upon its optical and structural characteristics has been investigated by spectroscopic ellipsometry and x-ray diffraction. Temperature-dependent resistance tests have further revealed that Ti-doped Ge2Sb2Te5 films have better thermal stability than undoped one. Based on the Arrhenius extrapolation results from data retention tests, the endurance temperature corresponding to 10-year data retention of a Ti-doped Ge2Sb2Te5 cell is higher than that of a common Ge2Sb2Te5 cell without dopant. All these experimental results have confirmed that the Ti-doped Ge2Sb2Te5 films are more suitable for the application in phase-change random access memory.
    ZHANG Ying, WEI Shen-Jin, YI Xin-Yu, CHENG Shuai, CHEN Kun, ZHU Huan-Feng, LI Jing, LV Lei. Improvement of phase change behavior in titanium-doped Ge2Sb2Te5 films[J]. Journal of Infrared and Millimeter Waves, 2015, 34(6): 658
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