Study on Metal Grating Structure for Improving Spectral Absorptivity of Infrared Microbolometer

[1] Safaei A, Modak S, Lee J, et. al. Opt. Express, 2018, 26(25): 32931.

[2] Shen N, Yu J, Tang Z. IEEE Photon Technol. Lett., 2015, 27(12): 1247.

[3] Wu Z Y, Tang S F, Zeng H Y, et al. Microelectron Reliab, 2018, 91: 313.

[4] Vadnala S, Paul N, Agrawal A, et al. Mat. Sci. Semicon. Proc., 2018, 81: 82.

[5] Bernardi M, Mustafa, Neaton J B, et al. Nat. Commun., 2015, 6: 7044.

[6] Zayats A V, Smolyaninov I I. J. Optics-UK, 2003, 5(4): S16.

[7] Melikyan A, Lindenmann N, Walheim S, et al. Opt. Express, 2011, 19(9): 8855.

[8] Lim S H, Mar W, Matheu P, et al. J. Appl. Phys., 2007, 101(10): 104309.

[9] Yokogawa S, Burgos S P, Atwater H A. Nano. Lett., 2012, 12(8): 4349.

[10] Han Z, Bozhevolnyi S I. Rep. Prog. Phys., 2012, 76(1): 016402.

[11] Akbari A, Tait R N, Berini P. Opt. Express, 2010, 18(8): 8505.

[12] Liu N, Mesch M, Weiss T, et al. Nano. Lett., 2010, 10(7): 2342.

[13] Stanley R. Nat. Photonics, 2012, 6(7): 409.

[14] Ordal M A, Long L L, Bell R J, et al. Appl. Optics, 1983, 22: 1099.

[15] Verleur H W, Barker J A S, Berglund C N. APS Journals, 1968, 172: 788