Composition, Structure and Properties of the Cr1-xAlxN Hard Films Deposited by Arc Ion Plating

Yajie MO; Minglei WANG; Weijie CHEN; Guoqiang LIN

doi:10.15541/jim20190353

Journals >Journal of Inorganic Materials >Volume 35 >Issue 6 >Page 675 > Article

Journal of Inorganic Materials
Vol. 35, Issue 6, 675 (2020)

Composition, Structure and Properties of the Cr_1-_xAl_xN Hard Films Deposited by Arc Ion Plating

Yajie MO^1、2, Minglei WANG^1、2, Weijie CHEN¹, and Guoqiang LIN^1、2、*

Author Affiliations

¹Material Science and Engineering School, Dalian University of Technology, Dalian 116024, China

²Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology, Dalian 116024, China

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DOI: 10.15541/jim20190353 Cite this Article

Yajie MO, Minglei WANG, Weijie CHEN, Guoqiang LIN. Composition, Structure and Properties of the Cr_1-_xAl_xN Hard Films Deposited by Arc Ion Plating[J]. Journal of Inorganic Materials, 2020, 35(6): 675 Copy Citation Text

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1. Schematic diagram of enhanced magnetic filtered pulse bias arc ion plating apparatus

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2. SEM surface and cross-sectional images of Cr_1-_xAl_xN films

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3. XPS spectra of Cr_1-_xAl_xN films obtained after argon ions sputtering for 600 s

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4. High resolution XPS spectra of Cr_1-_xAl_xN films

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5. XRD patterns of Cr_1-_xAl_xN films

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6. Hardness (H), elastic modulus (E) and H/E^* of Cr_1-_xAl_xN films

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7. Typical load-displacement curves of Cr_1-_xAl_xN films

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8. Frictional force vs normal force curves for Cr_1-_xAl_xN films during scratch test

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9. Micrographs of scratch of Cr_1-_xAl_xN films

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Sample	N₂ flow/sccm	Working pressure/Pa	Arc current/A		Pulsed bias			Deposition time/min
Sample	N₂ flow/sccm	Working pressure/Pa	I_Cr	I_Al	Frequency/kHz	Amplitude/V	Duty cycle/%	Deposition time/min
CrAlN 1#	80	0.8	110	50	30	-200	40	120
CrAlN 2#	80	0.8	95	65	30	-200	40	120
CrAlN 3#	80	0.8	80	80	30	-200	40	120
CrAlN 4#	80	0.8	65	95	30	-200	40	120

Table 1. Deposition parameters of Cr_1-_xAl_xN films

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Sample	Surface composition/at%				$\frac{{{C}_{\text{Al}}}}{({{C}_{Cr}}+{{C}_{\text{Al}}})}$	$\frac{{{C}_{\text{N}}}}{({{C}_{Cr}}+{{C}_{\text{Al}}})}$	Film composition(Cr_1-_xAl_xN_y)
Sample	Cr	Al	N	O	$\frac{{{C}_{\text{Al}}}}{({{C}_{Cr}}+{{C}_{\text{Al}}})}$	$\frac{{{C}_{\text{N}}}}{({{C}_{Cr}}+{{C}_{\text{Al}}})}$	Film composition(Cr_1-_xAl_xN_y)
CrAlN 1#	32.9	22.6	41.8	2.7	0.41	0.75	Cr_0.59Al_0.41N_0.75
CrAlN 2#	26.2	29.1	41.3	3.4	0.53	0.75	Cr_0.47Al_0.53N_0.75
CrAlN 3#	19.8	34.6	42.2	3.4	0.64	0.78	Cr_0.36Al_0.64N_0.78
CrAlN 4#	15.1	39.9	42.1	2.9	0.73	0.77	Cr_0.27Al_0.73N_0.77

Table 2. Surface composition of Cr_1-_xAl_xN films

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Sample	L_C1/N	L_C2/N	CPR_S
CrAlN 1#	75.4	83.8	633.36
CrAlN 2#	64.6	87.3	1466.42
CrAlN 3#	60.2	80.4	1216.14
CrAlN 4#	61.3	82.5	1299.56

Table 3. Critical load and CPR_S of Cr_1-_xAl_xN films

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