[1] Z. Liao, T. Xing, and H. Zhu, Proc. SPIE 7656, 866846 (2010).
[2] L. Deck, Appl. Opt. 42, 2354 (2003).
[3] Zygo, MST PSurf and MST PHom MetroPro Applications (2003).
[4] H. Liu, Chin. Opt. Lett. 10, 071201 (2012).
[5] H. Shen, R. Zhu, Z. Gao, E. Pun, W. Wong , and X. Zhu, Chin. Opt. Lett. 11, 032201 (2013).
[6] A. Sharma, Appl. Opt. 24, 4367 (1985).
[7] M. Born and E. Wolf, Principle of Optics, 7th ed. (Cambridge University Press, 1999).
[8] Synopsys, Inc. CODE V Electronic Document Library, version 10.5 (2012).
[9] Y. Omura, "Projection exposure methods and apparatus, and projection optical systems", U.S. patent 6,864,961B2 (2005).
[10] T. Matsuyama, I. Tanaka, T. Ozawa, K. Nomura, and T. Koyama, Proc. SPIE 5040, 801 (2003).
