Compact electro-optic modulator on lithium niobate

Bingcheng Pan; Hongyuan Cao; Yishu Huang; Zong Wang; Kaixuan Chen; Huan Li; Zejie Yu; Daoxin Dai

doi:10.1364/PRJ.449172

[1] C. Haffner, D. Chelladurai, Y. Fedoryshyn, A. Josten, B. Baeuerle, W. Heni, T. Watanabe, T. Cui, B. Cheng, S. Saha, D. L. Elder, L. R. Dalton, A. Boltasseva, V. M. Shalaev, N. Kinsey, J. Leuthold. Low-loss plasmon-assisted electro-optic modulator. Nature, 556, 483-486(2018).

[2] C. T. Phare, Y.-H. D. Lee, J. Cardenas, M. Lipson. Graphene electro-optic modulator with 30 GHz bandwidth. Nat. Photonics, 9, 511-514(2015).

[3] J.-H. Han, F. Boeuf, J. Fujikata, S. Takahashi, S. Takagi, M. Takenaka. Efficient low-loss InGaAsP/Si hybrid MOS optical modulator. Nat. Photonics, 11, 486-490(2017).

[4] M. Lee, H. E. Katz, C. Erben, D. M. Gill, P. Gopalan, J. D. Heber, D. J. McGee. Broadband modulation of light by using an electro-optic polymer. Science, 298, 1401-1403(2002).

[5] L. Alloatti, R. Palmer, S. Diebold, K. P. Pahl, B. Chen, R. Dinu, M. Fournier, J.-M. Fedeli, T. Zwick, W. Freude, C. Koos, J. Leuthold. 100 GHz silicon–organic hybrid modulator. Light Sci. Appl., 3, e173(2014).

[6] A. Honardoost, R. Safian, M. Teng, L. Zhuang. Ultralow-power polymer electro–optic integrated modulators. J. Semicond., 40, 070401(2019).

[7] A. Boes, B. Corcoran, L. Chang, J. Bowers, A. Mitchell. Status and potential of lithium niobate on insulator (LNOI) for photonic integrated circuits. Laser Photon. Rev., 12, 1700256(2018).

[8] S. Yuan, C. Hu, A. Pan, Y. Ding, X. Wang, Z. Qu, J. Wei, Y. Liu, C. Zeng, J. Xia. Photonic devices based on thin-film lithium niobate on insulator. J. Semicond., 42, 041304(2021).

[9] B. Pan, J. Hu, Y. Huang, L. Song, J. Wang, P. Chen, Z. Yu, L. Liu, D. Dai. Demonstration of high-speed thin-film lithium-niobate-on-insulator optical modulators at the 2-μm wavelength. Opt. Express, 29, 17710-17717(2021).

[10] C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, M. Lončar. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. Nature, 562, 101-104(2018).

[11] P. Kharel, C. Reimer, K. Luke, L. He, M. Zhang. Breaking voltage–bandwidth limits in integrated lithium niobate modulators using micro-structured electrodes. Optica, 8, 357-363(2021).

[12] M. He, M. Xu, Y. Ren, J. Jian, Z. Ruan, Y. Xu, S. Gao, S. Sun, X. Wen, L. Zhou, L. Liu, C. Guo, H. Chen, S. Yu, L. Liu, X. Cai. High-performance hybrid silicon and lithium niobate Mach–Zehnder modulators for 100 Gbits^-1 and beyond. Nat. Photonics, 13, 359-364(2019).

[13] S. Wang, D. Dai. Polarization-insensitive 2 × 2 thermo-optic Mach–Zehnder switch on silicon. Opt. Lett., 43, 2531-2534(2018).

[14] L. Song, H. Li, D. Dai. Mach–Zehnder silicon-photonic switch with low random phase errors. Opt. Lett., 46, 78-81(2021).

[15] C. Zhang, M. Zhang, Y. Xie, Y. Shi, R. Kumar, R. R. Panepucci, D. Dai. Wavelength-selective 2 × 2 optical switch based on a Ge₂Sb₂Te₅-assisted microring. Photon. Res., 8, 1171-1176(2020).

[16] C. Wang, M. Zhang, B. Stern, M. Lipson, M. Lončar. Nanophotonic lithium niobate electro-optic modulators. Opt. Express, 26, 1547-1555(2018).

[17] D. Liu, J. Tang, Y. Meng, W. Li, N. Zhu, M. Li. Ultra-low V_pp and high-modulation-depth InP-based electro–optic microring modulator. J. Semicond., 42, 082301(2021).

[18] B. Pan, Y. Tan, P. Chen, L. Liu, Y. Shi, D. Dai. Compact racetrack resonator on LiNbO₃. J. Lightwave Technol., 39, 1770-1776(2021).

[19] J. Wang, P. Chen, D. Dai, L. Liu. Polarization coupling of X-cut thin film lithium niobate based waveguides. IEEE Photon. J., 12, 2200310(2020).

[20] A. Pan, C. Hu, C. Zeng, J. Xia. Fundamental mode hybridization in a thin film lithium niobate ridge waveguide. Opt. Express, 27, 35659-35669(2019).

[21] M. Xu, M. He, X. Liu, Y. Pan, S. Yu, X. Cai. Integrated lithium niobate modulator and frequency comb generator based on Fabry-Perot resonators. Conference on Lasers and Electro-Optics, JTh2B.27(2020).

[22] M. V. Kotlyar, S. Iadanza, L. O’Faolain. Lithium niobate Fabry-Perot microcavity based on strip loaded waveguides. Photon. Nanostruct. Fundam. Appl., 43, 100886(2021).

[23] D. Liu, D. Dai. Silicon-based polarization-insensitive optical filter with dual-gratings. Opt. Express, 27, 20704-20710(2019).

[24] D. Liu, H. Wu, D. Dai. Silicon multimode waveguide grating filter at 2 μm. J. Lightwave Technol., 37, 2217-2222(2019).

[25] D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, H.-K. Tsang. 10-channel mode (de)multiplexer with dual polarizations. Laser Photon. Rev., 12, 1700109(2018).

[26] H. Qiu, J. Jiang, T. Hu, P. Yu, J. Yang, X. Jiang, H. Yu. Silicon add-drop filter based on multimode Bragg sidewall gratings and adiabatic couplers. J. Lightwave Technol., 35, 1705-1709(2017).

[27] G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, A. V. Krishnamoorthy. 25 Gb/s 1 V-driving CMOS ring modulator with integrated thermal tuning. Opt. Express, 19, 20435-20443(2011).

[28] M. Li, J. Ling, Y. He, U. A. Javid, S. Xue, Q. Lin. Lithium niobate photonic-crystal electro-optic modulator. Nat. Commun., 11, 4123(2020).

[29] D. A. B. Miller. Attojoule optoelectronics for low-energy information processing and communications. J. Lightwave Technol., 35, 346-396(2017).

[30] B.-B. Li, Y.-F. Xiao, C.-L. Zou, X.-F. Jiang, Y.-C. Liu, F.-W. Sun, Y. Li, Q. Gong. Experimental controlling of Fano resonance in indirectly coupled whispering-gallery microresonators. Appl. Phys. Lett., 100, 021108(2012).

[31] W. D. Sacher, W. M. J. Green, S. Assefa, T. Barwicz, H. Pan, S. M. Shank, Y. A. Vlasov, J. K. S. Poon. Coupling modulation of microrings at rates beyond the linewidth limit. Opt. Express, 21, 9722-9733(2013).