• Laser & Optoelectronics Progress
  • Vol. 51, Issue 9, 92206 (2014)
Fan Di*
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/lop51.092206 Cite this Article Set citation alerts
    Fan Di. Optimization of SiC Mirror Surface Roughness[J]. Laser & Optoelectronics Progress, 2014, 51(9): 92206 Copy Citation Text show less
    References

    [1] Fan Di. The Study on CCOS of Large-Diameter SiC Mirrors[D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2004.

    [2] M J Cumbo, D Fairhurst, S D Jacobs, et al.. Slurry particle size evolution during the polishing of optical glass[J]. Applied Optics, 1995, 34(19): 3743-3755.

    [3] Gao Jinsong, Shen Zhenfeng, Wang Xiaoyi, et al.. Research on surface modification of space used SiC mirror[J]. Acta Optica Sinica, 2009, 29(9): 2624-2629.

    [4] Dai Jinhui, Ge Zhaoming. Introduction to Inorganic Non-Metallic Materials[M]. Harbin: Harbin Institute of Technology Press, 1999.

    [5] Zhang Feng, Deng Weijie. Magnetic-medium assistant polishing of silicon modification layer on silicon carbide surface [J]. Acta Optica Sinica, 2012, 32(11): 1116001.

    [6] Wang Xiaokun, Zheng Ligong, Zhang Xuejun. Testing convex aspheres by subaperture stitching interferometry[J]. Acta Optica Sinica, 2010, 30(7): 2022-2026.

    [7] S Malkin, T W Hwang. Grinding mechanisms for ceramics[J]. CIRP Annals-Mawfacturing Technology, 1996, 45(2): 569-580.

    [8] H H Xu, S Jahanmir. Material removal and damage formation mechanisms in grinding silicon nitride[J]. J Mater Res, 1996, 11(7): 1717-1724.

    [9] Deng Zhaohui, Zhang Bi, Sun Zongyu, et al.. Material removal mechanism of ceramics grinding[J]. Diamond & Abrasives Engineering, 2002, 2(128): 47-51.

    [10] Liu Zixu. Mechanism of ceramic grinding[J]. Ceramics & Grinding, 1998, (1): 36-42.

    [11] Fan Di, Zhang Zhongyu, Niu Haiyan, et al.. Optical surfacing on RB-SiC spherical mirror[J]. Optical Technique, 2004, 30(1): 6-8.

    [12] Fan Di, Zhang Xuejun, Zhang Zhongyu, et al.. Optical surfacing on RB-SiC flat mirror[J]. Optical Technique, 2003, 29(6): 667-668.

    [13] Fan Di, Zhang Zhongyu, Niu Haiyan, et al.. Optical surfacing on SiC mirror[J]. Journal of Chinese Ceramic Society, 2003, 31(11): 1096-1100.

    [14] Feng Yan, Di Fan, Binzhi Zhang, et al.. Manufacturing and testing of a cubic SiC surface[J]. Chin Opt Lett, 2009, 7(6): 534-536.

    [15] M A Ealey, J A Wellman. Polishability of CERAFORM silicon carbide[C]. SPIE, 1996, 2857: 78-85.

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    Fan Di. Optimization of SiC Mirror Surface Roughness[J]. Laser & Optoelectronics Progress, 2014, 51(9): 92206
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