[1] B. Vidal, A. Fornier, E. Pelletier. Wideband optical monitoring of nonquarterwave multilayer filters[J]. Appl. Opt., 1979, 18(22): 3851~3856
[3] Telemark Co. Ltd. Model Om820 In Situ Spectroscopic Opticalmonitor User′s Guide[R]. Telemark Co., 2000
[4] Wayne G. Sainty, David W. Sainty. Multiwavelength monitoring of thin filmgrowth using a fiber spectrometer[C]. SPIE, 2000, 4094: 31~37
[5] Liu Xiaoyuan, Huang Yun, Zhou Ningping et al.. The system of the wideband monitoring of optical film thickness[J]. J. National University of Defense Technology, 2001, 23(1): 23~27
[7] Zhou Pengfei, Chen Guilian, Zhang Rongfu. Development the instrument of monitoring the thickness of film by wideband spectrum[J]. Optical Instruments, 2001, 23(5-6): 36~40
[8] Luo Yuqiang, Ren Hao, Wang Qiaobin et al.. A comprehensive monitoring system with wideband spectrum by fiber optic spectrometer[J]. Vacuum, 2008, 45(6): 57~59
[10] Han Jun, Kong Xiuying, Shang Xiaoyan et al.. Absorption coefficient of thin film material affection optical coating wideband monitoring technology[J]. Optical Technique, 2005, 31(5): 672~678
[11] Yang Shenghong, Yu Zhaoxian, Li Huiqiu et al.. Simulated annealing optimization algorithm for inverting ellipsometric spectra[J]. J. Infrared Millimeter Waves, 2000, 19(5): 338~341
[15] Guo Maozu, Jiang Junfeng, Li Jingmei. Research on cooling sehedule selecting method in simulated annealing algorithm[J]. Computer Engineering, 2000, 26(9): 63~64
[16] Gao Shang. Research on annealing strategy in simulated annealing algorithm[J]. Aeronautical Computer Technique, 2002, 32(4): 20~22