Raman Spectra Analysis of Bromine Doped Hydrogenated Amorphous Carbon (a-C∶Br∶H)Films Deposited by RF-PECVD

[1] Mokuno Y, Chayahara A, Horino Y, et al. Surface and Coatings Technology,2002,156:328.

[2] Angus J C, Buck F A. Materials Research,1989,14:38.

[3] Roy M, Mali K, Joshi N, et al. Diamond and Related Materials,2007,16(3):517.

[4] Theobald M, Baclet P, Legaie O. J. Vac. Sci. Technol. A,2001,19(1):118.

[5] Raymond B, Michael S, Robert C. J. Vac. Sci. Technol. A,1995,13(3):948.

[6] Filik J, May P W, Pearce S R J, et al. Diamond and Related Materials,2003,12:974.

[7] Xu Jun qi, Fan Huiqing, Kousaka Hiroyuki, et al. Surface & Coatings Technology,2007,201:6631.

[8] Krishnaswamy J, Rengan A, Narayan J, et al. Appl. Phys. Lett.,1989,54:2455.

[9] Shroder R E, Nemanich R J, Glass J T. PhysicalReview B,1990,41:3738.

[10] Ferrari A C, Robertson J. Phys. Rev. B,2000,61:14095.

[11] Castiglioni C, Tommasini M, Zerbi G, et al. Phylosophical Transactions of Roycal Society of London, Series A,2004,362:2425.

[12] Tsai H, Bogy D B. J. Vac. Sic. Technol. A,1987,5:3287.

[13] Nemanich R J, Glass J T, Lucovsky Getal. J. Vac. Sic. Technol. A,1988,6:1783.

[14] Orwa J O, Andrienko I, Peng J L, et al. J. Appl. Phys.,2004,96(11):6286.