Ground deformation is effectively monitored insitu, and rules and trends of surface irregular subsidence are discovered. Thereby the sinking situation of the whole surface movement areas is determined. Micro inertial measurement unit （MIMU）and fiber grating sensors are used to build a distributed network for surface deformation data measurement. A new exponential type of wavelet algorithm combined time series analysis is proposed to carry out the wavelet threshold denoising processing for the data collected, and the denoising effect is obvious. Kalman filtering is used to forecast deformation trend of the deformable body. The results indicate that the data obtained by this method are accurate and effective. The method can be applied to engineering practice of terrain deformation forecast.