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    Journals >Acta Optica Sinica >Volume 35 >Issue 3 >Page 331001 > Article
    • Acta Optica Sinica
    • Vol. 35, Issue 3, 331001 (2015)
    Preparation and Characteristic of Oxide Capping-Layer on Extreme Ultraviolet Reflective Mirrors
    Wang Xun1、2、*, Jin Chunshui1, Li Chun1, and Kuang Shangqi1
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201535.0331001 Cite this Article Set citation alerts
    Wang Xun, Jin Chunshui, Li Chun, Kuang Shangqi. Preparation and Characteristic of Oxide Capping-Layer on Extreme Ultraviolet Reflective Mirrors[J]. Acta Optica Sinica, 2015, 35(3): 331001 Copy Citation Text show less
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    Article index updated: May. 19, 2024
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    Wang Xun, Jin Chunshui, Li Chun, Kuang Shangqi. Preparation and Characteristic of Oxide Capping-Layer on Extreme Ultraviolet Reflective Mirrors[J]. Acta Optica Sinica, 2015, 35(3): 331001
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