[2] Basting D, Stamm U. The development of excimer laser technology-history and future prospects [J]. International J. Research in Physical Chemistry and Chemical Physics, 2001, 215(15): 75-99.
[4] Bagayev S N, Razhev A M, Zhupik A A, et al. 1.3 J KrF excimer laser with efficiency 2.5% [J]. Proc. of SPIE, 2003, 5120: 231-235.
[5] Basting D, Marowsky G. Excimer Laser Technology [M]. Berlin: Springer, 2005: 306-308.
[6] Masters A, Geuking T, et al. Beam-shaping optics expand excimer-laser applications [J]. Laser Focus World, 2005, 41: 99-103.
[8] Delmdahl R, Paetzel R. The Midas touch: Surface processing with the UV excimer laser [J]. Laser Technik Journal, 2009, (1): 24-29.
[10] Do Seung-Woo, Kong Seong Ho, Lee Yong-Hyun. Ultra-shallow junction formation using plasma doping and excimer laser annealing for nano-technology CMOS applications [J]. Journal of the Korean Physical Society, 2009, 55(3): 1065-1069.
[11] Shibahara K, et al. Merits of heat assist for melt laser annealing [J]. IEEE Transactions on Electron Devices, 2006, 53(5): 1059-1063.
[12] Targeting diesel engine efficiency [OL]. http://www.industrial-lasers.com/articles/print/volume-19/issue-10/features/targeting-diesel-engine-efficiency.html.
[13] Wang Ting, Guo Xia, Fang Yuan, et al. Integration of GaN thin films with silicon substrates by fusion bonding and laser lift-off [J]. Chinese Optics Letters, 2006, 4(7): 416-418.
[14] Delmdahl R F, Power scaling of excimer lasers drives display and lidar applications [J]. Proc. of SPIE, 2012, 8238: 82380A.
[15] Chang T Y. Improved uniform-field electrode profiles for TEA laser and high-voltage applications [J]. Review of Scientific Instruments, 1973, 44(4): 405-407.
[17] Basting D, Marowsky G. Excimer Laser Technology [M]. Berlin: Springer, 2005: 41-103.
[19] Partlo Willim, Sandstrom Rick, Fomenkov Igor, et al. A low cost of ownership KrF excimer light source using a novel pulse power and chamber configuration [J]. Proc. of SPIE, 1995, 24(40): 90-100.
[20] Ness R, Melcher P, Ferguson G, et al. A decade of solid state pulsed power development at cymer INC [C]. IEEE International Power Modulator Conference, 2004, 228-233.