• Optics and Precision Engineering
  • Vol. 10, Issue 1, 45 (2002)
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45 Copy Citation Text show less
    References

    [1] Haelbich R, Segmiiller A. Smooth multilayer films suitable for X-ray mirrors[J]. Appl. Phys. Lett, 1979, 34(3):184-186.

    [2] Thomas N. Low-scatter, low-loss mirrors for laser gyros[J]. SPIE, 1978, 157: 41-48.

    [4] Moran M. Scatter intensity mapping of laser-illuminated coating defects[J]. Appl. Opt, 1988, 27: 957-962.

    [7] Ralph J. Schwarz and Bernard Friedland, Linear Systems[M].New York:McGraw-hill Book Company, 1965.

    [8] Church E L , Vorburger T V, Wyant J C,et al. Direct comparison of mechanical and optical measurements of the finish of precision machined optical surfaces[J]. Opt. Eng,1985, 24(3): 388-395.

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    [1] ZHANG Qiu-jia, ZHAO Yu-hua, HAN Dong, YU Ping, LIU Ming-zhu. On-line Measurement of Surface Roughness Based on Laser Two-dimensional Scattering Principle[J]. Opto-Electronic Engineering, 2011, 38(6): 110

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45
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