• Optics and Precision Engineering
  • Vol. 10, Issue 1, 45 (2002)
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  • [in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45 Copy Citation Text show less

    Abstract

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45
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