Cd1-xZnxTe (CZT) polycrystalline thin films are deposited by vacuum co-evaporation and then annealed either with 50%CdCl2+50%ZnCl2 complex source or with ZnCl2 source. The optical, morphological and electrical properties of films annealed at different temperatures and in different time are studied by X-ray fluorescence, scanning electron microscopy, transmission spectra and conduction type tests. The results show that the band gaps of CZT thin films annealed with 50%CdCl2+50%ZnCl2 complex source decrease apparently. CZT thin films annealed with ZnCl2 source show smooth morphology and larger grain size and the band gaps remain steady. Both annealing temperature and the amount of ZnCl2 source have influence on film morphology and electrical properties.