Author Affiliations
1 Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China2 State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China3 Key Laboratory of Infrared Detecting and Imaging Technology, Chinese Academy of Sciences, Shanghai 200083, China4 University of Chinese Academy of Sciences, Beijing 100049, Chinashow less
Fig. 1. Optical path of the segmented mirror co-phase detection system
Fig. 2. (a) Schematic of the mask plate; (b) alignment schematic of mask plate and segmented mirrors; (c) prism array
Fig. 3. Eleven diffraction template patterns. (a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20
Fig. 4. Contour maps of every template pattern in Fig. 3. (a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20
Fig. 5. (a) Phase plate; (b) double semicircle diffraction mask plate; (c) double semicircle diffraction mask plate with only one hole
Fig. 6. Diffraction patters corresponding to four phase differences with the wavelength of 635 nm. (a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm
Fig. 7. Diffraction patters corresponding to four phase differences with the wavelength of 650 nm. (a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm
Half wavelength period | Optical path difference |
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0.36λ | 0.72λ | 1.08λ | -2.16λ |
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-5λ/20 | 0.759 | 0.871 | 0.490 | 0.845 | -4λ/20 | 0.895 | 0.858 | 0.478 | 0.856 | -3λ/20 | 0.881 | 0.837 | 0.475 | 0.873 | -2λ/20 | 0.842 | 0.803 | 0.836 | 0.831 | -λ/20 | 0.658 | 0.388 | 0.841 | 0.418 | 0 | 0.470 | 0.364 | 0.843 | 0.489 | λ/20 | 0.439 | 0.350 | 0.851 | 0.471 | 2λ/20 | 0.501 | 0.343 | 0.844 | 0.761 | 3λ/20 | 0.655 | 0.772 | 0.474 | 0.796 | 4λ/20 | 0.737 | 0.887 | 0.481 | 0.824 | 5λ/20 | 0.759 | 0.871 | 0.490 | 0.845 |
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Table 1. Correlation matching results of the four situations when the wavelength is 635 nm
Half wavelength period | Optical path difference |
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0.35λ | 0.70λ | 1.06λ | -2.11λ |
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-5λ/20 | 0.867 | 0.712 | 0.430 | 0.448 | -4λ/20 | 0.879 | 0.721 | 0.606 | 0.788 | -3λ/20 | 0.893 | 0.680 | 0.667 | 0.880 | -2λ/20 | 0.790 | 0.481 | 0.767 | 0.890 | -λ/20 | 0.395 | 0.327 | 0.862 | 0.762 | 0 | 0.409 | 0.332 | 0.870 | 0.460 | λ/20 | 0.423 | 0.328 | 0.884 | 0.457 | 2λ/20 | 0.414 | 0.528 | 0.852 | 0.705 | 3λ/20 | 0.408 | 0.607 | 0.826 | 0.737 | 4λ/20 | 0.786 | 0.779 | 0.609 | 0.629 | 5λ/20 | 0.867 | 0.712 | 0.430 | 0.448 |
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Table 2. Correlation matching results of the four situations when the wavelength is 650 nm
Parameter | Optical path difference |
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229 nm | 458 nm | 687 nm | -1347 nm |
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z1 | -4λ1/20 | 4λ1/20 | λ1/20 | -3λ1/20 | z2 | -3λ2/20 | 4λ2/20 | λ2/20 | -2λ2/20 | m | 1 | 1 | 2 | -4 | n | 1 | 1 | 2 | -4 | /nm | 190.5 | 444.5 | 666.75 | -1365.25 | /nm | 227 | 455 | 682.5 | -1365 | Error value of /nm | -38.5 | 13.5 | -20.25 | 18.25 | Error value of /nm | -2 | -3 | -4.5 | 18 |
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Table 3. Results of the two wavelength narrow band co-phase algorithm with λ1=635 nm, λ2=650 nm