Hailong Du, Zhaobin Duan, Xiaodong Sun. White Light Interference Signal Processing Method Based on Fourier Frequency Spectrum Analysis[J]. Laser & Optoelectronics Progress, 2021, 58(9): 0907001
- Laser & Optoelectronics Progress
- Vol. 58, Issue 9, 0907001 (2021)
Fig. 1. Schematic of white light interferometer imaging
Fig. 2. White light interference signal under illumination of white light LED. (a) Frequency-spectrum of interference signal; (b) white light interference signal
Fig. 3. White light interference signal and envelope curves of signals in different frequency bands
Fig. 4. Frequency-spectrum parameters and surface roughness under different energy ratios. (a) Relationship between wavenumber interval and energy ratio; (b) relationship between surface arithmetic mean height and energy ratio
Fig. 5. Relationship between cost function value and energy ratio
Fig. 6. Surface measurement results of silver mirror. (a)(b) Twice repeated measurements of the same area; (c) profile of two measurements at Y=174 µm; (d) deviation curve between the average value and the profile at Y=174 µm
Fig. 7. Step structure measurement result. (a) Three-dimensional topography of step structure; (b) profile of step structure at Y=174 µm
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Table 1. Experimental data of several energy ratios
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