• Opto-Electronic Engineering
  • Vol. 36, Issue 5, 52 (2009)
ZHANG Chun-hui*, CHEN Long-jiang, LIANG Yi-yong, and YANG Guo-guang
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    ZHANG Chun-hui, CHEN Long-jiang, LIANG Yi-yong, YANG Guo-guang. Two-spectrum Method for Measuring the Thickness of Photoresist in Lithography Techniques[J]. Opto-Electronic Engineering, 2009, 36(5): 52 Copy Citation Text show less
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    ZHANG Chun-hui, CHEN Long-jiang, LIANG Yi-yong, YANG Guo-guang. Two-spectrum Method for Measuring the Thickness of Photoresist in Lithography Techniques[J]. Opto-Electronic Engineering, 2009, 36(5): 52
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