[2] SENTURIA S D,ALURU N,WHITE J.Simulating the behavior of MEMS devices:computational methods and needs[J].IEEE,1997,4(1):30-43.
[3] MUKHERJEE T,FEDDER G K,RAMASWAMY D,et al..Emerging simulation approaches for micromachined devices[J].IEEE,2000,19(12):1572-1589.
[4] GABBAY L D,MEHNER J E,SENTURIA S D.Computer-aided generation of nonlinear reduced-order dynamic macromodels.Part Ⅰ.Non-stress-stiffened case[J].Journal of Microelectromechanical Systems,2000,9:262-269.
[5] MEHNER J E,GABBAY L D,SENTURIA S D.Computer-aided generation of nonlinear reduced-order dynamic macromodels.Part Ⅱ.Stress-stiffened case[J].Journal of Microelectromechanical Systems,2000,9:270-278.
[6] BENNINI F,MEHNER J,DOTZEL W.Computational methods for reduced order modeling of coupled domain simulations[C].Proc.of the International.Conference on Solid-State Sensors and Actuators Transducers,Munich,Germany,2001:260-263.
[9] NAYFEH A H,PAI P F.Linear and Nonlinear Structural Mechanics[M].New York:wiley,2004.
[11] ROCHUS V,RIXEN D J,GOLINVALJ C.Electrostatic coupling of MEMS structures:transient simulations and dynamic pull-in[J].Nonlinear Analysis,2005,63(5-7):e1619-e1633.
