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    Journals >Optics and Precision Engineering >Volume 16 >Issue 5 >Page 839 > Article
    • Optics and Precision Engineering
    • Vol. 16, Issue 5, 839 (2008)
    Macro modeling method for electrostatical drive silicon diaphragm
    1,2, 1, and 1
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese]. Macro modeling method for electrostatical drive silicon diaphragm[J]. Optics and Precision Engineering, 2008, 16(5): 839 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese]. Macro modeling method for electrostatical drive silicon diaphragm[J]. Optics and Precision Engineering, 2008, 16(5): 839
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