• Laser & Optoelectronics Progress
  • Vol. 58, Issue 7, 0712001 (2021)
Pufu Yin, Tengfei Wu*, and Xiaobo Chai
Author Affiliations
  • State Key Laboratory of Precision Measuring Technology & Instruments, School of Precision Instruments and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China
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    DOI: 10.3788/LOP202158.0712001 Cite this Article Set citation alerts
    Pufu Yin, Tengfei Wu, Xiaobo Chai. Vibration Measurement Method Based on Laser Self-Mixing Frequency Modulation Characteristics[J]. Laser & Optoelectronics Progress, 2021, 58(7): 0712001 Copy Citation Text show less
    Schematic diagram of self-mixing interference
    Fig. 1. Schematic diagram of self-mixing interference
    Self-mixing vibration measuring system
    Fig. 2. Self-mixing vibration measuring system
    Simulation results of reconstruction. (a) Unwrapped phase of AM signal; (b) unwrapped phase of FM signal; (c) reconstructed vibration curve; (d) error of reconstruction
    Fig. 3. Simulation results of reconstruction. (a) Unwrapped phase of AM signal; (b) unwrapped phase of FM signal; (c) reconstructed vibration curve; (d) error of reconstruction
    Simulated measurement range
    Fig. 4. Simulated measurement range
    Reconstruction errors at different optical feedback levels
    Fig. 5. Reconstruction errors at different optical feedback levels
    Experimental equipment
    Fig. 6. Experimental equipment
    Experimental results of reconstruction. (a) AM signal; (b) FM signal; (c) unwrapped phase of AM signal; (d) unwrapped phase of FM signal; (e) reconstructed vibration curve
    Fig. 7. Experimental results of reconstruction. (a) AM signal; (b) FM signal; (c) unwrapped phase of AM signal; (d) unwrapped phase of FM signal; (e) reconstructed vibration curve
    Vibration repeated measurement results
    Fig. 8. Vibration repeated measurement results
    Driving voltage amplitude /mVReconstructed amplitude /nmMeanvalue /nmStandard deviation /nm
    12345678
    2001616.51611.91622.71621.61627.01634.91622.61614.91621.57.3
    3002496.72505.02495.02492.92493.72500.52491.32494.12496.24.5
    4003297.63297.93298.43298.53295.53299.23296.53294.43297.31.7
    5004092.24103.54094.54090.24100.54088.34091.14090.44093.85.4
    6005021.35023.45023.25020.35018.65020.45017.65010.55019.44.1
    7005827.15841.45828.55833.85822.25841.25839.85829.45832.97.3
    8006644.76677.76661.96641.26657.56665.26637.66672.16657.214.8
    9007516.17518.17494.07504.17517.17498.27512.07501.27507.69.4
    10008335.68351.18356.28342.38365.48335.28335.38356.18347.211.7
    Table 1. Measurement results
    Pufu Yin, Tengfei Wu, Xiaobo Chai. Vibration Measurement Method Based on Laser Self-Mixing Frequency Modulation Characteristics[J]. Laser & Optoelectronics Progress, 2021, 58(7): 0712001
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