Experiments of dual ion beam sputter deposited (DIBS) oxide coatings wereinvestigated systematically. The influences of ion beam sputter parameters on opticalproperties of thin film were analysized. Refractive indices of TiO2 and ZrO2 filmsapproach to those of bulk materials. Optical absorptions of TiO2, ZrO2 adn SiO2 coatingsare reduced significantly. Laser-induced damage thresholds of TiO2 and ZrO2 are enhancedobviously. DIBS HR coating was prepared and its reflectance is higher than 99.5%. Its laser induced damage threshold is improved by high temperature annealing treatment, higher than that of e-gun evaporated coating.