• Journal of Infrared and Millimeter Waves
  • Vol. 37, Issue 1, 15 (2018)
FU Xing-Chang1、2、*, LV Yuan-Jie3, ZHANG Li-Jiang1、2, ZHANG Tong1, LI Xian-Jie2, SONG Xu-Bo2, ZHANG Zhi-Rong2, FANG Yu-Long3, and FENG Zhi-Hong3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.11972/j.issn.1001-9014.2018.01.004 Cite this Article
    FU Xing-Chang, LV Yuan-Jie, ZHANG Li-Jiang, ZHANG Tong, LI Xian-Jie, SONG Xu-Bo, ZHANG Zhi-Rong, FANG Yu-Long, FENG Zhi-Hong. High-frequency InAlN/GaN HFET with an fT of 350 GHz[J]. Journal of Infrared and Millimeter Waves, 2018, 37(1): 15 Copy Citation Text show less

    Abstract

    Scaled InAlN/GaN heterostructure field-effect transistors (HFETs) with high unity current gain cut-off frequency (fT) were realized by employing nonalloyed regrown n+-GaN Ohmic contacts, in which the source-to-drain distance (Lsd) was scaled to 600 nm. By processing optimization of dry etching and n+-GaN regrowth, a low total Ohmic resistance of 0.16 Ω·mm is obtained, which is a recorded value regrown by metal organic chemical vapor deposition (MOCVD). A 34 nm rectangular gate was fabricated by self-aligned-gate technology. The electrical characteristics of the devices, especially for the RF characteristics, were improved greatly after the reduction of ohmic resistance and gate length. The fabricated InAlN/GaN HFETs show a low on resistance (Ron) of 041 Ω·mm and a high drain saturation current density of 2.14 A/mm at Vgs=1 V. Most of all, the device shows a high fT of 350 GHz, which is a recorded result reported for GaN-based HFETs in domestic.
    FU Xing-Chang, LV Yuan-Jie, ZHANG Li-Jiang, ZHANG Tong, LI Xian-Jie, SONG Xu-Bo, ZHANG Zhi-Rong, FANG Yu-Long, FENG Zhi-Hong. High-frequency InAlN/GaN HFET with an fT of 350 GHz[J]. Journal of Infrared and Millimeter Waves, 2018, 37(1): 15
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