Vibration Performance Researching in the MEMS Galvanometer of an Imaging Lidar System

Qu Yang; Wang Chunhui; Pang Yajun; Tang Tiantian

doi:10.3788/aos201434.s111004

Journals >Acta Optica Sinica >Volume 34 >Issue s1 >Page 111004 > Article

Acta Optica Sinica
Vol. 34, Issue s1, 111004 (2014)

Vibration Performance Researching in the MEMS Galvanometer of an Imaging Lidar System

Qu Yang^*, Wang Chunhui, Pang Yajun, and Tang Tiantian

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[in Chinese]

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DOI: 10.3788/aos201434.s111004 Cite this Article Set citation alerts

Qu Yang, Wang Chunhui, Pang Yajun, Tang Tiantian. Vibration Performance Researching in the MEMS Galvanometer of an Imaging Lidar System[J]. Acta Optica Sinica, 2014, 34(s1): 111004 Copy Citation Text

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Abstract

The micro electro mechanical system (MEMS) galvanometer of an imaging lidar system is analyzed, experiment measures the key elements of the vibration performance of MEMS: frequency and driving voltag. The results show that scanning in the frequency of 60~200 Hz and driving voltage belove 60 V can make wide angle scanning and satisfy the demand of 64~256 point per second.

Keywords

angle frequency imaging lidar imaging systems micro electro mechnical system

Qu Yang, Wang Chunhui, Pang Yajun, Tang Tiantian. Vibration Performance Researching in the MEMS Galvanometer of an Imaging Lidar System[J]. Acta Optica Sinica, 2014, 34(s1): 111004

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