Huaizhi Zhang, Jiaming Xu, Lantian Zhang, Yingxiong Qin. Algorithm and Experiment of Silicon Wafer Multifocus Laser Stealth Dicing[J]. Chinese Journal of Lasers, 2022, 49(2): 0202018
- Chinese Journal of Lasers
- Vol. 49, Issue 2, 0202018 (2022)
Fig. 1. Schematic of multi-focus distribution under large numerical aperture
Fig. 2. Nonlinear mapping diagram
Fig. 3. Flow chart of iterative loop for solving objective function
Fig. 4. Simulation results of equivalent energy three-focus with axial focus interval of 80 μm. (a) Phase hologram；(b) axial intensity distribution
Fig. 5. Simulation results of equivalent energy five-focus with axial focus interval of 160 μm. (a) Phase hologram; (b) axial intensity distribution
Fig. 6. Simulation results of five-focus with axial focus interval of 160 μm and energy ratio of 1∶2∶3∶2∶1. (a) Phase hologram; (b) axial intensity distribution
Fig. 7. Schematic of experimental multi-focus stealth dicing setup
Fig. 8. Cross-section of wafers after cutting
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