Algorithm and Experiment of Silicon Wafer Multifocus Laser Stealth Dicing

Huaizhi Zhang; Jiaming Xu; Lantian Zhang; Yingxiong Qin

doi:10.3788/CJL202249.0202018

Journals >Chinese Journal of Lasers >Volume 49 >Issue 2 >Page 0202018 > Article

Chinese Journal of Lasers
Vol. 49, Issue 2, 0202018 (2022)

Algorithm and Experiment of Silicon Wafer Multifocus Laser Stealth Dicing

Huaizhi Zhang, Jiaming Xu, Lantian Zhang, and Yingxiong Qin^*

Author Affiliations

School of Optical and Electronic Information, Huazhong University of Science and Technology, National Engineering Research for Laser Processing, Wuhan, Hubei 430074, China

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DOI: 10.3788/CJL202249.0202018 Cite this Article Set citation alerts

Huaizhi Zhang, Jiaming Xu, Lantian Zhang, Yingxiong Qin. Algorithm and Experiment of Silicon Wafer Multifocus Laser Stealth Dicing[J]. Chinese Journal of Lasers, 2022, 49(2): 0202018 Copy Citation Text

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Huaizhi Zhang, Jiaming Xu, Lantian Zhang, Yingxiong Qin. Algorithm and Experiment of Silicon Wafer Multifocus Laser Stealth Dicing[J]. Chinese Journal of Lasers, 2022, 49(2): 0202018

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