• Acta Photonica Sinica
  • Vol. 50, Issue 11, 1111001 (2021)
Nan CHEN1,2, Yue WANG1,*, Tao LIU1,2,*, and Yang XIA1,2,3,4
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China
  • 2University of Chinese Academy of Sciences,Beijing 100049,China
  • 3Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication,Beijing 100029,China
  • 4Beijing Key Laboratory of IC Test Technology,Beijing 100029,China
  • show less
    DOI: 10.3788/gzxb20215011.1111001 Cite this Article
    Nan CHEN, Yue WANG, Tao LIU, Yang XIA. Development and Application Test of Scattering-type Scanning Near-field Optical Microscope[J]. Acta Photonica Sinica, 2021, 50(11): 1111001 Copy Citation Text show less
    s-SNOM schematic and physical diagram
    Fig. 1. s-SNOM schematic and physical diagram
    Point-dipole model and COMSOL finite element simulation results
    Fig. 2. Point-dipole model and COMSOL finite element simulation results
    s-SNOM approach curve of 1Ω,2Ω,3Ω
    Fig. 3. s-SNOM approach curve of 1Ω,2Ω,3Ω
    AFM topography and1Ω,2Ω,and 3Ω near-field optical imaging of gold-silicon grating sample
    Fig. 4. AFM topography and1Ω,2Ω,and 3Ω near-field optical imaging of gold-silicon grating sample
    The center of the focused spot changes with time
    Fig. 5. The center of the focused spot changes with time
    AFM topography and s-SNOM imaging map of gold nanoparticle samples
    Fig. 6. AFM topography and s-SNOM imaging map of gold nanoparticle samples
    AFM topography and s-SNOM imaging map of h-BN samples
    Fig. 7. AFM topography and s-SNOM imaging map of h-BN samples
    Demodulation frequency1Ω2Ω3Ω4Ω
    Signal5.2 mV824 μV127 μV38 μV
    Noise(RMS)107 μV13.63 μV1.97 μV1.53 μV
    SNR33.7 dB35.6 dB36.1 dB27.8 dB
    Noise(RMS)/Stage-off37.1 μV2.4 μV1.23 μV1.02 μV
    Table 1. Signal and noise comparison under different demodulation orders
    Nan CHEN, Yue WANG, Tao LIU, Yang XIA. Development and Application Test of Scattering-type Scanning Near-field Optical Microscope[J]. Acta Photonica Sinica, 2021, 50(11): 1111001
    Download Citation