• Acta Photonica Sinica
  • Vol. 50, Issue 11, 1111001 (2021)
Nan CHEN1、2, Yue WANG1、*, Tao LIU1、2、*, and Yang XIA1、2、3、4
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China
  • 2University of Chinese Academy of Sciences,Beijing 100049,China
  • 3Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication,Beijing 100029,China
  • 4Beijing Key Laboratory of IC Test Technology,Beijing 100029,China
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    DOI: 10.3788/gzxb20215011.1111001 Cite this Article
    Nan CHEN, Yue WANG, Tao LIU, Yang XIA. Development and Application Test of Scattering-type Scanning Near-field Optical Microscope[J]. Acta Photonica Sinica, 2021, 50(11): 1111001 Copy Citation Text show less

    Abstract

    Based on scanning probe microscope, a set of scattering scanning near-field optical imaging device is designed. The structure of the device and the basic near-field signal detection principle are introduced, andthe influence of the demodulation order, focus spot size and other factors on the near-field optical signal extraction are discussed through models and experiments. In order to verify the performance of the device, a sample of gold nano-particles and a sample of h-BN microcrystals be characterized. The results show that the home-made device achieves a spatial resolution of 10 nm, and the standing wave phenomenon formed by the h-BN phonon polarization excimer can be clearly observed, demonstrating the huge application potential of this technology.
    Nan CHEN, Yue WANG, Tao LIU, Yang XIA. Development and Application Test of Scattering-type Scanning Near-field Optical Microscope[J]. Acta Photonica Sinica, 2021, 50(11): 1111001
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