Automatic Shadow Moire Topography

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 15 >Issue 9 >Page 1275 > Article

Acta Optica Sinica
Vol. 15, Issue 9, 1275 (1995)

Automatic Shadow Moire Topography

[in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. Automatic Shadow Moire Topography[J]. Acta Optica Sinica, 1995, 15(9): 1275 Copy Citation Text

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Abstract

The phase- shift technique is adopted to the conventional shadow moire topography to improve the measuring sensitivity and compunctional processing. The generation and error of phase-shift and experimental results are presented.

Keywords

automatic processing shadow moire phase-shift

[in Chinese], [in Chinese], [in Chinese]. Automatic Shadow Moire Topography[J]. Acta Optica Sinica, 1995, 15(9): 1275

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