ZHANG Lin-rui, ZHOU Bing-qing, ZHANG Na, LU Xiao-cui, WUREN Tu-ya, GAO Ai-ming. Influence of Nitrogen Flow Rate on the Structure and Luminescence Properties of Silicon-Rich Silicon Nitride Film Materials in a High Hydrogen Atmosphere[J]. Spectroscopy and Spectral Analysis, 2016, 36(7): 2048