[1] GILES C R,AKSYUK V,BARBER B,et al. A silicon MEMS attenuator and its use in lightwave subsystems[J]. IEEE Journal of selected topics in quantum electronics,1999,5(1): 18-25.
[2] CAO Z H,YUAN Y,BAO J F,et al. A Micromechanical Variable Optical Attenuator based on EDM micromachining[J]. SPIE,2002,4928: 225-227.
[3] MARXER C,DE JONG B,DE ROOLF N. Comparison of MEMS variable optical attenuator designs[A]. Optical MEMS[C],Lugano,Switzerland: IEEE/LEOSInt. 2002. 189-190.
[4] JI C H,YEE Y,CHOI J,et al. Electromagnetic variable optical attenuator[A]. Optical MEMS[C],Lugano,Switzerland: IEEE/LEOS Int. 2002. 49-50.
[5] DUTTON H J R. Understanding Optical Communication[M]. Portland: IBM,1998.
[6] MA K,SUN L P. A Minitype Variable Optical Attenuator Based on Stepping Motor Control Technology[J]. Optical Fiber Communication Technology,2002,3 :19-21 (in chinese) .
[7] KOGELNIK H. Matching of Optical Modes[J] . Bell System Technical Journal,1964,43(1): 334-337.
[8] BORN M,Wolf E. Principles of Optics: 5th ed[M]. Oxford,U.K.: Pergamon,1975. 380-381.
[9] WANG G Q. Practical numerical simulation techniques by ANSYS[M] . Xi'an: Xibei technical Press,2001(in chinese) .
