Researching | Silica-MEMS-based Fiber-optic Fabry-Perot Pressure Sensor for High-temperature Applications

Journals >Acta Photonica Sinica >Volume 51 >Issue 6 >Page 0606005 > Article

Acta Photonica Sinica
Vol. 51, Issue 6, 0606005 (2022)

Silica-MEMS-based Fiber-optic Fabry-Perot Pressure Sensor for High-temperature Applications

Jiashun LI, Pinggang JIA, Jun WANG, Jia LIU, Guowen AN, and Jijun XIONG^*

Author Affiliations

State Key Laboratory of Dynamic Measurement Technology，North University of China，Taiyuan 030051，China

show less

DOI: 10.3788/gzxb20225106.0606005 Cite this Article

Jiashun LI, Pinggang JIA, Jun WANG, Jia LIU, Guowen AN, Jijun XIONG. Silica-MEMS-based Fiber-optic Fabry-Perot Pressure Sensor for High-temperature Applications[J]. Acta Photonica Sinica, 2022, 51(6): 0606005 Copy Citation Text

show less

References

[1] M PAlMER, M DAVIS, G ENGELBRECHT et al. High temperature, un-cooled interstage turbine pressure measurement in small gas turbine engine, 4373(2005).

[2] B MOSLEHI, W PRICE, R BLACK et al. High-bandwidth fiber-optic pressure sensors for high-temperature aerospace applications, 0715(2018).

[3] G RINALDI, I STIHARU, M PACKIRISMY et al. Dynamic pressure as a measure of gas turbine engine (GTE) performance. Measurement Science and Technology, 21, 045201(2010).

[4] D SWEENEY, A SCHRELL, Y LIU et al. Metal-embedded fiber optic sensor packaging and signal demodulation scheme towards high-frequency dynamic measurements in harsh environments. Sensors and Actuators A: Physical, 312, 112075(2020).

[5] L CHEN, M MEHREGANY. A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement. Sensors and Actuators A: Physical, 145, 2-8(2008).

[6] T REAGAN, J MELOY, J UNDERBRINK et al. Fabrication and characterization of a flush-mount MEMS piezoelectric dynamic pressure sensor and associated package for aircraft fuselage arrays, 0477(2017).

[7] A BERNS, E OBERMEIER, X WANG et al. Aero MEMS sensor with integrated pressure and hot-wire sensor for high-frequency transition detection, 318(2009).

[8] D MILLS, D ALEXANDER, G SUBHASH et al. Development of a sapphire optical pressure sensor for high-temperature applications. In Sensors for Extreme Harsh Environments, International Society for Optics and Photonics, 91130H(2014).

[9] H HASHEMIAN. On-line monitoring applications in nuclear power plants. Progress in Nuclear Energy, 53, 167-181(2011).

[10] Wenhui WANG, Nan WU, Ye TIAN et al. Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm. Optics Express, 18, 9006-9014(2010).

[11] Yinan ZHANG, Lei YUAN, Xinwen LAN et al. High-temperature fiber-optic Fabry-Perot interferometric pressure sensor fabricated by femtosecond laser. Optics Letters, 38, 4609-4612(2013).

[12] Changrui LIAO, Shen LIU, Lei XU et al. Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement. Optics Letters, 39, 2827-2830(2014).

[13] Jiashun LI, Pinggang JIA, Guocheng FANG et al. Batch-producible all-silica fiber-optic Fabry-Perot pressure sensor for high-temperature applications up to 800℃. Sensors and Actuators A: Physical, 334, 113363(2022).

[14] Pinggang JIA, Hao LIANG, Guocheng FANG et al. Batch-producible MEMS fiber-optic Fabry-Perot pressure sensor for high-temperature application. Applied Optics, 57, 6687-6692(2018).

[15] Jinde YIN, Tiegen LIU, Junfeng JIANG et al. Batch-producible fiber-optic Fabry-Pérot sensor for simultaneous pressure and temperature sensing. IEEE Photonics Technology Letters, 26, 2070-2073(2014).

[16] Xiaoguang QI, Shuang WANG, Junfeng JIANG et al. Fiber optic Fabry-Perot pressure sensor with embedded MEMS micro-cavity for ultra-high pressure detection. Journal of Lightwave Technology, 37, 2719-2725(2018).

[17] Yueying LIU, Zhenguo JING, Riu LI et al. Miniature fiber-optic tip pressure sensor assembled by hydroxide catalysis bonding technology. Optics Express, 28, 948-958(2020).

[18] Wangwang LI, Ting LIANG, Pinggang JIA et al. Fiber-optic Fabry-Perot pressure sensor based on sapphire direct bonding for high-temperature applications. Applied Optics, 58, 1662-1666(2019).

[19] Zhiqiang SHAO, Yalin WU, Shuang WANG et al. All-sapphire-based fiber-optic pressure sensor for high-temperature applications based on wet etching. Optics Express, 29, 4139-4146(2021).

[20] Xue WANG, Junfeng JIANG, Shuang WANG et al. All-silicon dual-cavity fiber-optic pressure sensor with ultralow pressure-temperature cross-sensitivity and wide working temperature range. Photonics Research, 9, 521-529(2021).

[21] Xu GUO, Jingcheng ZHOU, Cong DU et al. Highly sensitive miniature all-silica fiber tip Fabry-Pérot pressure sensor. IEEE Photonics Technology Letters, 31, 689-692(2019).

[22] Shen LIU, Yiping WANG, Changrui LIAO et al. Nano silica diaphragm in-fiber cavity for gas pressure measurement. Scientific Reports, 7, 1-9(2017).

[23] Weiyi MA, Yi JIANG, Hongchun GAO. Miniature all-fiber extrinsic Fabry-Pérot interferometric sensor for high-pressure sensing under high-temperature conditions. Measurement Science and Technology, 30, 025104(2019).

[24] Wenhua WANG, Weina WU, Shengxu WU et al. Adhesive-free bonding homogenous fused-silica Fabry-Perot optical fiber low pressure sensor in harsh environments by CO2 laser welding. Optics Communications, 435, 97-101(2019).

[25] Yueying LIU, Zhenguo JING, Qing LIU et al. Differential-pressure fiber-optic airflow sensor for wind tunnel testing. Optics Express, 28, 25101-25113(2020).

[26] D GIOVANNI. Flat and corrugated diaphragm design handbook(1982).

[27] Juncheng XU, G PICKRELL, Bing YU et al. Epoxy-free high-temperature fiber optic pressure sensors for gas turbine engine applications, 5590, 1-10(2004).

[28] Qianyu REN, Pinggnag JIA, Guowen AN et al. Dual-wavelength demodulation technique for interrogating a shortest cavity in multi-cavity fiber-optic Fabry-Perot sensors. Optics Express, 29, 32658-32669(2021).

Figures&Tables (7)

References (28)

Copy Citation Text

Jiashun LI, Pinggang JIA, Jun WANG, Jia LIU, Guowen AN, Jijun XIONG. Silica-MEMS-based Fiber-optic Fabry-Perot Pressure Sensor for High-temperature Applications[J]. Acta Photonica Sinica, 2022, 51(6): 0606005

Download Citation

Save the article for my favorites

Paper Information

Recommended Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology

Set citation alerts for the article

Please enter your email address