Jiashun LI, Pinggang JIA, Jun WANG, Jia LIU, Guowen AN, Jijun XIONG. Silica-MEMS-based Fiber-optic Fabry-Perot Pressure Sensor for High-temperature Applications[J]. Acta Photonica Sinica, 2022, 51(6): 0606005
- Acta Photonica Sinica
- Vol. 51, Issue 6, 0606005 (2022)
Fig. 1. All-silica fiber-optic FP pressure sensor
Fig. 2. FP cavity MEMS etching process flow chart
Fig. 3. Fabrication process of the all-silica pressure sensor based on the silica wafer
Fig. 4. Experimental setup of high-temperature static pressure test
Fig. 5. High-temperature static pressure experimental results of the proposed all-silica fiber-optic pressure sensor
Fig. 6. Repeatability and stability experimental results of the proposed all-silica fiber-optic pressure sensor
Fig. 7. Room-temperature dynamic pressure experimental results of the proposed all-silica fiber-optic pressure sensor
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