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    Journals >Acta Optica Sinica >Volume 4 >Issue 4 >Page 322 > Article
    • Acta Optica Sinica
    • Vol. 4, Issue 4, 322 (1984)
    A lithographic optical system having only one symmetric plan
    WANG ZHIJING, LI YUANKANG, and JIANG JIANZHONG
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    WANG ZHIJING, LI YUANKANG, JIANG JIANZHONG. A lithographic optical system having only one symmetric plan[J]. Acta Optica Sinica, 1984, 4(4): 322 Copy Citation Text show less
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    WANG ZHIJING, LI YUANKANG, JIANG JIANZHONG. A lithographic optical system having only one symmetric plan[J]. Acta Optica Sinica, 1984, 4(4): 322
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