Microscopic Dark-Field Scattering Imaging and Digitalization Evaluation System of Defects on Optical Devices Precision Surface

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

[1] Wang Fengquan, Yang Yongying, Sun Dandan et al.. Digital realization of precision surface defect evaluation system[C]. Proc. SPIE, 2005, 6150: 61500F-1～61500F-5

[2] Sun Dandan, Yang Yongying, Wang Fengquan et al.. Microscopic scattering imaging system of defects on ultra-smooth surface suitable for digital image processing[C]. Proc. SPIE, 2005, 6150: 6150012-1～6150012-6

[4] M. Born, E. Wolf. Principles of Optics[M]. 7th Edition, Cambridge: Cambridge University Press, 1999. 695～734

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