• Acta Optica Sinica
  • Vol. 34, Issue 3, 323001 (2014)
Li Jing1、2、*, Gong Yan1, Liao Jiasheng1、2, and Zhang Wei1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201434.0323001 Cite this Article Set citation alerts
    Li Jing, Gong Yan, Liao Jiasheng, Zhang Wei. Long Trace Profiler Based on Multiple-Beam Interference[J]. Acta Optica Sinica, 2014, 34(3): 323001 Copy Citation Text show less
    References

    [1] Haixian Ye, Liming Yang. Accuracy and analysis of long-radius measurement with long trace profiler [J]. Chin Opt Lett, 2011, 9(10): 102301.

    [2] K Von Bieren. Pencil beam interferometer for aspheric optical surfaces [C]. SPIE, 1982, 343: 101-108.

    [3] K Von Bieren. Interferometry of wave fronts reflected off conical surfaces [J]. Appl Opt, 1983, 22(14): 2109-2114.

    [4] P Z Takacs, S N Qian. Surface Profiling Interferometer [P]. US Patent 4884697, 1989-12-05.

    [5] S C Irick. Determining surface profile from sequential interference patterns from a long tracer profiler [J]. Rev Sci Instrum, 1992, 63(1): 1432-1435.

    [6] P Z Takacs, E L Church, C J Bresloff, et al.. Improvements in the accuracy and repeatability of long trace profiler measurements [J]. Appl Opt, 1999, 38(25): 5468-5479.

    [7] S N Qian, W Jark, P Z Takacs. The penta-prism LTP: a long-trace-profiler with stationary optical head and moving penta-prism [J]. Rev Sci Instrum, 1995, 66(3): 2562-2569.

    [8] S N Qian, W Jark, P Z Takacs, et al.. In situ surface profiler for high heat load mirror measurement [J]. Opt Eng, 1995, 34(2):396-402.

    [9] Haizhang Li, Peter Z Takacs, Tom Oversluizen. Vertical scanning long trace profiler: a tool for metrology of X-ray mirrors [C]. SPIE, 1997, 3152: 180-187.

    [10] Yang Zhao, Zhi Li, Dacheng Li, et al.. Principle of π-phase plate long trace profiler for synchrotron radiation optics [J]. Opt Commun, 2001, 200(1-6): 23-26.

    [11] Shinan Qian, Peter Z Takacs. Equal optical path beam splitter for a pencil beam interferometer and shearing interferometer [J]. Opt Eng, 2003, 42(4): 929-934.

    [12] Li Shun, Gong Yan, Zhang Wei, et al.. Design of co-path scanning long trace profiler for measurement of X-ray space optical elements [C]. SPIE, 2010, 7544: 754421.

    [13] Li Shun, Gong Yan. Error analysis and correction during measurement of tube-shaped super-smooth mirrors using long trace profiler [J]. Acta Optica Sinica, 2011, 31(11): 1112001.

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    Li Jing, Gong Yan, Liao Jiasheng, Zhang Wei. Long Trace Profiler Based on Multiple-Beam Interference[J]. Acta Optica Sinica, 2014, 34(3): 323001
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