Heterodyne vibration measurement and signal processing for environmental micro-disturbances on phase-shifting interferometer

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 9 >Page 53 > Article

Opto-Electronic Engineering
Vol. 31, Issue 9, 53 (2004)

Heterodyne vibration measurement and signal processing for environmental micro-disturbances on phase-shifting interferometer

[in Chinese]^1、2, [in Chinese]¹, [in Chinese]¹, and [in Chinese]¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Heterodyne vibration measurement and signal processing for environmental micro-disturbances on phase-shifting interferometer[J]. Opto-Electronic Engineering, 2004, 31(9): 53 Copy Citation Text

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References

[1] WU D,CHEN L,CHEN J B,et al.Spatial phase-shifting method for adaptive vibration resistant interferometer [J].Acta Photonica Sinica,2003,32(8):969-972.

[2] FRESCHI A A,FREJLICH J.Adjustable phase control in stabilized interferometry [J].Opt.Lett,1995,20(6):635-637.

[3] YAMAGUCHI I,LIU J Y,KATO J.Active phase-shifting interferometers for shape and deformation measurements [J].Opt.Eng,1996,35(10):2930-2937.

[4] NGOI B K A,VENKATAKRISHNAN K.An acousto-optic vibrometer for measurement of vibration in ultra-precision machine tools [J].Int.J.Adv.Manuf.Technol,2000,16(4):830-834.

[8] Analog Devices Inc.AD8302: LF-2.7GHz RF/IF Gain and Phase Detector Data sheet [EB/OL].http://www.analog.com,2002-07-01 /2002-11-04.

CLP Journals

[1] Zhang Qican, Su Xianyu. Research Progress of Dynamic Three-Dimensional Shape Measurement[J]. Laser & Optoelectronics Progress, 2013, 50(1): 10001

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