Heterodyne vibration measurement and signal processing for environmental micro-disturbances on phase-shifting interferometer

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 9 >Page 53 > Article

Opto-Electronic Engineering
Vol. 31, Issue 9, 53 (2004)

Heterodyne vibration measurement and signal processing for environmental micro-disturbances on phase-shifting interferometer

[in Chinese]^1、2, [in Chinese]¹, [in Chinese]¹, and [in Chinese]¹

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¹[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Heterodyne vibration measurement and signal processing for environmental micro-disturbances on phase-shifting interferometer[J]. Opto-Electronic Engineering, 2004, 31(9): 53 Copy Citation Text

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