• Advanced Photonics
  • Vol. 7, Issue 3, 034002 (2025)
Bin Zhang, Wenchao Yan*, and Feng Chen*
Author Affiliations
  • Shandong University, School of Physics, State Key Laboratory of Crystal Materials, Jinan, China
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    DOI: 10.1117/1.AP.7.3.034002 Cite this Article Set citation alerts
    Bin Zhang, Wenchao Yan, Feng Chen, "Recent advances in femtosecond laser direct writing of three-dimensional periodic photonic structures in transparent materials," Adv. Photon. 7, 034002 (2025) Copy Citation Text show less
    Comparison of second-harmonic build-up (P2ω) under the same propagation length (z/lc) in domain-modification-based (i.e., v=0.5 or 0.75) NPCs, domain-erasure-based (i.e., v=0) NPCs, and domain-inversion-based (i.e., v=−1) NPCs. The cases for perfect PM and phase mismatching (i.e., v=1) are also drawn in this picture. Reproduced with permission from Ref. 114.
    Fig. 1. Comparison of second-harmonic build-up (P2ω) under the same propagation length (z/lc) in domain-modification-based (i.e., v=0.5 or 0.75) NPCs, domain-erasure-based (i.e., v=0) NPCs, and domain-inversion-based (i.e., v=1) NPCs. The cases for perfect PM and phase mismatching (i.e., v=1) are also drawn in this picture. Reproduced with permission from Ref. 114.
    Domain-modification-based quasi-3D NPCs in LiNbO3 crystals. (a) The setup for fabricating quasi-3D NPCs. (b) The fabrication routine of quasi-3D NPCs. (c) The end-face microscopic image of quasi-3D NPCs. Reproduced with permission from Ref. 112.
    Fig. 2. Domain-modification-based quasi-3D NPCs in LiNbO3 crystals. (a) The setup for fabricating quasi-3D NPCs. (b) The fabrication routine of quasi-3D NPCs. (c) The end-face microscopic image of quasi-3D NPCs. Reproduced with permission from Ref. 112.
    Truly 3D NPCs written by femtosecond laser in LiNbO3 crystals. (a) The Čerenkov second-harmonic microscopic image of the first two layers in 3D NPCs. (b) The confocal second-harmonic microscopic image obtained from non-engineered (i.e., un-erased) and engineered (i.e., erased) areas. (c) The second-harmonic intensity distribution along the black line in panel (b). Reproduced with permission from Ref. 2.
    Fig. 3. Truly 3D NPCs written by femtosecond laser in LiNbO3 crystals. (a) The Čerenkov second-harmonic microscopic image of the first two layers in 3D NPCs. (b) The confocal second-harmonic microscopic image obtained from non-engineered (i.e., un-erased) and engineered (i.e., erased) areas. (c) The second-harmonic intensity distribution along the black line in panel (b). Reproduced with permission from Ref. 2.
    First domain-inversion-based truly 3D NPCs in ferroelectric BCT crystals. Panels (a) and (b) demonstrate the reciprocal lattice vectors of 2D NPCs and 3D NPCs, respectively. (c) The Čerenkov second-harmonic microscopic image of 3D NPCs. Reproduced with permission from Ref. 1.
    Fig. 4. First domain-inversion-based truly 3D NPCs in ferroelectric BCT crystals. Panels (a) and (b) demonstrate the reciprocal lattice vectors of 2D NPCs and 3D NPCs, respectively. (c) The Čerenkov second-harmonic microscopic image of 3D NPCs. Reproduced with permission from Ref. 1.
    Femtosecond-laser-induced nanodomains in LiNbO3 crystals. (a) The 3D model of ruler-shaped nanodomains. Panels (b) and (c) show the PFM images on cross-sections of this ruler. (d) The PFM image of wide-angle nonlinear diffraction grating. The measured nonlinear Raman–Nath diffraction pattern is displayed in the inset. Reproduced with permission from Ref. 110.
    Fig. 5. Femtosecond-laser-induced nanodomains in LiNbO3 crystals. (a) The 3D model of ruler-shaped nanodomains. Panels (b) and (c) show the PFM images on cross-sections of this ruler. (d) The PFM image of wide-angle nonlinear diffraction grating. The measured nonlinear Raman–Nath diffraction pattern is displayed in the inset. Reproduced with permission from Ref. 110.
    APP PM for nonlinear frequency conversion. (a) The schematic of birefringent PM in negative uniaxial crystals. (b) The schematic of quasi-PM in ferroelectric crystals. (c) The schematic of APP PM in arbitrary nonlinear optical crystals. (d) The amplitude of the second-harmonic field under PM, quasi-PM, APP PM, and phase mismatching. Reproduced with permission from Ref. 108.
    Fig. 6. APP PM for nonlinear frequency conversion. (a) The schematic of birefringent PM in negative uniaxial crystals. (b) The schematic of quasi-PM in ferroelectric crystals. (c) The schematic of APP PM in arbitrary nonlinear optical crystals. (d) The amplitude of the second-harmonic field under PM, quasi-PM, APP PM, and phase mismatching. Reproduced with permission from Ref. 108.
    Femtosecond-laser-induced type-I and type-II modifications in LiNbO3 crystals. Panels (a) and (d) show refractive-index profiles of type-I modification and type-II modification, respectively. Panels (b) and (e) demonstrate refractive-index profiles at horizontal cross-sections in panels (a) and (d). Panels (c) and (f) are mode profiles at 633 nm, corresponding to modifications in panels (a) and (d), respectively. Reproduced with permission from Ref. 3.
    Fig. 7. Femtosecond-laser-induced type-I and type-II modifications in LiNbO3 crystals. Panels (a) and (d) show refractive-index profiles of type-I modification and type-II modification, respectively. Panels (b) and (e) demonstrate refractive-index profiles at horizontal cross-sections in panels (a) and (d). Panels (c) and (f) are mode profiles at 633 nm, corresponding to modifications in panels (a) and (d), respectively. Reproduced with permission from Ref. 3.
    Schematic of typical 3D NPCs written by tightly focused femtosecond laser in nonlinear optical crystals.
    Fig. 8. Schematic of typical 3D NPCs written by tightly focused femtosecond laser in nonlinear optical crystals.
    Femtosecond-laser-written NPCs in LiNbO3 crystals for photon pair generation. (a) The experimental setup for fabricating periodically-inverted domain structures in Ti-indiffused LiNbO3 waveguides. (b) Optical microscopic image of 2D periodically inverted domain structures. The small circles represent inverted domains. (c) The 3D profile of periodically inverted domain structures acquired by Čerenkov second-harmonic microscopy. Reproduced with permission from Ref. 125.
    Fig. 9. Femtosecond-laser-written NPCs in LiNbO3 crystals for photon pair generation. (a) The experimental setup for fabricating periodically-inverted domain structures in Ti-indiffused LiNbO3 waveguides. (b) Optical microscopic image of 2D periodically inverted domain structures. The small circles represent inverted domains. (c) The 3D profile of periodically inverted domain structures acquired by Čerenkov second-harmonic microscopy. Reproduced with permission from Ref. 125.
    The 2nd to 5th harmonic generation of 1030 nm in femtosecond-laser-written quartz NPCs. (a) The optical microscopic image of laser-written quartz NPCs. (b) The period length distribution of quartz NPCs. (c) The experimental setup for generating the 2nd to 5th harmonic generation of 1030 nm. (d) The photograph of the 2nd to 4th harmonic generation. Reproduced with permission from Ref. 127.
    Fig. 10. The 2nd to 5th harmonic generation of 1030 nm in femtosecond-laser-written quartz NPCs. (a) The optical microscopic image of laser-written quartz NPCs. (b) The period length distribution of quartz NPCs. (c) The experimental setup for generating the 2nd to 5th harmonic generation of 1030 nm. (d) The photograph of the 2nd to 4th harmonic generation. Reproduced with permission from Ref. 127.
    Second harmonic Hermite-Gaussian beam generation in femtosecond-laser-written 3D LiNbO3 NPCs. (a) The model and confocal second harmonic image of 3D LiNbO3 NPCs. (b) The second harmonic diffraction patterns pumped at 818 nm. (c) The dependence of the 1st-diffraction-order output power on fundamental wavelength. (d) The dependence of output power of second harmonic Hermite-Gaussian beam on fundamental power at 818 nm. Reproduced with permission from Ref. 111.
    Fig. 11. Second harmonic Hermite-Gaussian beam generation in femtosecond-laser-written 3D LiNbO3 NPCs. (a) The model and confocal second harmonic image of 3D LiNbO3 NPCs. (b) The second harmonic diffraction patterns pumped at 818 nm. (c) The dependence of the 1st-diffraction-order output power on fundamental wavelength. (d) The dependence of output power of second harmonic Hermite-Gaussian beam on fundamental power at 818 nm. Reproduced with permission from Ref. 111.
    Femtosecond-laser-written two-sequential 3D NPCs in LiNbO3 crystals for simultaneously reconstructing multiple second harmonic structured beams. (a) The schematic of quasi-PM mechanism for reconstructing multiple second harmonic structured beams at a single wavelength. (b) The schematic of two-sequential 3D NPCs for simultaneously reconstructing second harmonic structured beams composed of vortex beams and hexagonal diffracted beams. (c) Second harmonic structured beams emitted from the 3D NPCs, which are pumped with 834 nm. Reproduced with permission from Ref. 98.
    Fig. 12. Femtosecond-laser-written two-sequential 3D NPCs in LiNbO3 crystals for simultaneously reconstructing multiple second harmonic structured beams. (a) The schematic of quasi-PM mechanism for reconstructing multiple second harmonic structured beams at a single wavelength. (b) The schematic of two-sequential 3D NPCs for simultaneously reconstructing second harmonic structured beams composed of vortex beams and hexagonal diffracted beams. (c) Second harmonic structured beams emitted from the 3D NPCs, which are pumped with 834 nm. Reproduced with permission from Ref. 98.
    Nonlinear detour phase holography in femtosecond-laser-written SBN NPCs. (a) The schematic of the experimental setup for nonlinear holographic imaging. (b) The measured H-shaped far-field SHG holographic image. (c) The simulated SHG intensity distribution in the far-field. (d) The simulated result improved with a phase plate. Reproduced with permission from Ref. 89.
    Fig. 13. Nonlinear detour phase holography in femtosecond-laser-written SBN NPCs. (a) The schematic of the experimental setup for nonlinear holographic imaging. (b) The measured H-shaped far-field SHG holographic image. (c) The simulated SHG intensity distribution in the far-field. (d) The simulated result improved with a phase plate. Reproduced with permission from Ref. 89.
    Large field-of-view nonlinear holography in femtosecond-laser-written LiNbO3 NPCs. (a) The reconstruction of a cube at the second harmonic wave, corresponding to view angles of −45 deg, −15 deg, 15 deg, and 45 deg. (b) The large-area hexagonal array is formed by combining the central, first, and higher orders of second harmonic fields. Reproduced with permission from Ref. 100.
    Fig. 14. Large field-of-view nonlinear holography in femtosecond-laser-written LiNbO3 NPCs. (a) The reconstruction of a cube at the second harmonic wave, corresponding to view angles of 45  deg, 15  deg, 15 deg, and 45 deg. (b) The large-area hexagonal array is formed by combining the central, first, and higher orders of second harmonic fields. Reproduced with permission from Ref. 100.
    Schematic of typical 3D waveguide arrays written by tightly focused femtosecond laser in transparent materials.
    Fig. 15. Schematic of typical 3D waveguide arrays written by tightly focused femtosecond laser in transparent materials.
    Topological photonics in femtosecond-laser-written waveguides. (a) Floquet TIs in a honeycomb lattice consist of helical waveguides. (b) Experimental observation of topological chiral edge states. (a), (b) Reproduced with permission from Ref. 161. (c) 3D Floquet TIs with photonic waveguides. (d) Experimental observation of the evolution of edge-wave packets in the 3D synthetic-space TI. (c), (d) Reproduced with permission from Ref. 175. (e) Fractal TIs in a fourth-generation Sierpinski lattice. (f) Experimental observation of topological edge transport in the Sierpinski lattice. (e), (f) Reproduced with permission from Ref. 176. (g) HOTIs in 2D SSH lattice. (h) Experimental observation of topological corner states. (g), (h) Reproduced with permission from Ref. 177.
    Fig. 16. Topological photonics in femtosecond-laser-written waveguides. (a) Floquet TIs in a honeycomb lattice consist of helical waveguides. (b) Experimental observation of topological chiral edge states. (a), (b) Reproduced with permission from Ref. 161. (c) 3D Floquet TIs with photonic waveguides. (d) Experimental observation of the evolution of edge-wave packets in the 3D synthetic-space TI. (c), (d) Reproduced with permission from Ref. 175. (e) Fractal TIs in a fourth-generation Sierpinski lattice. (f) Experimental observation of topological edge transport in the Sierpinski lattice. (e), (f) Reproduced with permission from Ref. 176. (g) HOTIs in 2D SSH lattice. (h) Experimental observation of topological corner states. (g), (h) Reproduced with permission from Ref. 177.
    Non-Hermitian photonics in femtosecond-laser-written waveguides. (a) Passive PT-symmetric system in 1D femtosecond-laser-written waveguides. (a) Reproduced with permission from Ref. 192. (b) 2D PT-symmetric graphene lattice. (b) Reproduced with permission from Ref. 191. (c) Floquet PT-symmetry in photonic waveguides. (c) Reproduced with permission from Ref. 196. (d) PT-symmetric photonic Floquet TI. (d) Reproduced with permission from Ref. 197. (e) Schematic of Floquet non-Hermitian skin effect in a 1D optical array. (f) Experimental results of the non-Hermitian skin effect. (e), (f) Reproduced with permission from Ref. 198.
    Fig. 17. Non-Hermitian photonics in femtosecond-laser-written waveguides. (a) Passive PT-symmetric system in 1D femtosecond-laser-written waveguides. (a) Reproduced with permission from Ref. 192. (b) 2D PT-symmetric graphene lattice. (b) Reproduced with permission from Ref. 191. (c) Floquet PT-symmetry in photonic waveguides. (c) Reproduced with permission from Ref. 196. (d) PT-symmetric photonic Floquet TI. (d) Reproduced with permission from Ref. 197. (e) Schematic of Floquet non-Hermitian skin effect in a 1D optical array. (f) Experimental results of the non-Hermitian skin effect. (e), (f) Reproduced with permission from Ref. 198.
    Quantum photonics in femtosecond-laser-written waveguides. (a) PT-symmetric quantum interference in a coupled two-waveguide system. (a) Reproduced with permission from Ref. 205. (b) Dynamically localized quantum optical states in photonic lattice contain three waveguides. (b) Reproduced with permission from Ref. 206. (c) Quantum transport in the fractal lattice. (c) Reproduced with permission from Ref. 207. (d) 3D non-Abelian quantum holonomy. (d) Reproduced with permission from Ref. 208.
    Fig. 18. Quantum photonics in femtosecond-laser-written waveguides. (a) PT-symmetric quantum interference in a coupled two-waveguide system. (a) Reproduced with permission from Ref. 205. (b) Dynamically localized quantum optical states in photonic lattice contain three waveguides. (b) Reproduced with permission from Ref. 206. (c) Quantum transport in the fractal lattice. (c) Reproduced with permission from Ref. 207. (d) 3D non-Abelian quantum holonomy. (d) Reproduced with permission from Ref. 208.
    Modulation categoriesRelative ratioCrystalline/amorphousConversion efficiencyRepetition rateThermal effect
    Domain modification0<v<1Partially amorphousLowLowNegligible
    Domain erasurev=0Completely amorphousHighLowNegligible
    Domain inversionv=1CrystallineHigherHighNon-negligible
    Table 1. Comparison of similarities and differences among three domain-modulation scenarios.
    Nonlinear crystalsLaser-processing parameters of NPCsModulation categoriesParameters of pump laserWaveguide configurationsConversion mechanismsParameters of output laserRef.
    Central wavelengthPulse durationRepetition rateLaser wavelengthLaser regimeLaser wavelengthLaser powerConversion efficiency
    LiNbO3800 nm170 fs100 kHzDomain modification1545 nmPulsedNoneSHG773 nm>1  μW112
    800 nm104 fs1 kHzDomain erasure829 nmPulsedNoneSHG415 nm180  μW2.3×1042
    800 nm120 fs1 kHzDomain modification1064 nmPulsedDepressed-cladding waveguideSHG532 nm25.1 W0.0637%  W1cm2123
    800 nm180 fs76 MHzDomain inversion815 nmPulsedTi-indiffused waveguideSHG408 nm15.28 mW17.45%103
    800 nm180 fs76 MHzDomain inversion406 nmPulsedTi-indiffused waveguideSPDC812 nm125
    1030 nm500 fs1 kHzDomain modification1064 nmPulsedDouble-line waveguideSHG532 nm1 mW8.76%  W1cm2128
    800 nm110 fs1 kHzDomain modification1064 nmPulsedDepressed-cladding waveguideSHG532 nm7 W2.4%114
    BCT815 nm180 fs76 MHzDomain inversion1340 nmPulsedNoneSHG670 nm2.3 W1.7×106  W1cm11
    PMN-38PT800 nm180 fs80 MHzDomain inversion1035 nmPulsedNoneSHG518 nm71.38  μW129
    Quartz crystals1040 nm350 fs200 kHzNonlinearity erasure355 nmPulsedNoneSHG177.3 nm20.4  μW1‰108
    1030 nm240 fs200 kHzNonlinearity erasure442 to 664 nmPulsedNoneSHG221 to 332 nm1.46 kW1.01%115
    1030 nm240 fs200 kHzNonlinearity erasure335.6 nm and 355 nmPulsedNoneSHG167.8 nm and 177.3 nm30.42 mW and 1.1 mW1.46‰ and 1.7‰116
    1030 nm240 fs1 MHzNonlinearity erasure1030 nmPulsedNone2nd to 5th harmonic generation515 nm, 343.3 nm, 257.5 nm, and 206 nm25.92 mW2.7%127
    Table 2. Summary of the latest results for nonlinear frequency conversion in femtosecond-laser-written NPCs.
    Nonlinear crystalsLaser-processing parameters of NPCsModulation categoriesParameters of pump laserBeam-shaping mechanismsParameters of output laserRef.
    Central wavelengthPulse durationRepetition rateLaser modeLaser wavelengthLaser regimeLaser modeLaser wavelength
    LiNbO3800 nm104 fs1 kHzDomain erasureGaussian beams820 nm, 818 nm, 802 nm, and 781 nmPulsedSHGVortex and Hermite-Gaussian beams410 nm, 409 nm, 401 nm, and 391 nm111
    1030 nm500 fs1 kHzDomain erasureGaussian beams1064 nmPulsedSHGHermite-Gaussian beams532 nm131
    800 nm110 fs1 kHzDomain modificationGaussian beams1064 nmPulsedSHGVortex beams532 nm114
    800 nm104 fs1 kHzDomain erasureGaussian beams857 nm, 837 nm, 834 nm, 831 nm, 827 nm, and 784 nmPulsedSHGHexagonal diffracted, Hermite-Gaussian, and vortex beams429 nm, 419 nm, 417 nm, 416 nm, 414 nm, and 392 nm98
    1026 nm190 fs200 kHzDomain modificationGaussian beams1030 nmPulsedSHGFlat-top beams515 nm130
    CBN800 nm180 fs76 MHzDomain inversionGaussian beams1600 nm and 1550 nmPulsedSHGVortex, Gaussian, and conical beams800 nm and 775 nm88
    780 nm180 fs76 MHzDomain inversionGaussian beams1200 nmPulsed and continuous-waveSHGVortex beams600 nm109
    SBN800 nm180 fs76 MHzDomain inversionGaussian beams1560 nmPulsedSHGVortex beams780 nm132
    780 nm180 fs76 MHzDomain inversionGaussian beams1560 nmPulsedSHGOptical bottle beams780 nm99
    800 nm180 fs76 MHzDomain inversionGaussian beams1340 nm, 1390 nm, 1430 nm, 1480 nm, and 1550 nmPulsedSHGVortex and Hermite-Gaussian beams670 nm, 695 nm, 715 nm, 740 nm, and 775 nm97
    Table 3. Summary of the latest results for nonlinear beam shaping in femtosecond-laser-written NPCs.
    Nonlinear crystalsLaser-processing parameters of NPCsModulation categoriesParameters of pump laserHolography mechanismsHolographic performancesRef.
    Central wavelengthPulse durationRepetition rateLaser wavelengthLaser regime
    LiNbO3800 nm104 fs1 kHzDomain erasure746–875 nmPulsedSHGQuasi-phase-matching-division multiplexing holography102
    800 nm75 fs80 MHzDomain inversion840 nm, 900 nm, 975 nm, 1064 nm, and 1342 nmPulsedFrequency up-conversionNano-resolution 3D nonlinear hologram101
    800 nm75 fs80 MHzDomain inversion800 nmPulsedSHGLarge field-of-view nonlinear holography100
    CBN800 nm180 fs76 MHzDomain inversion1560 nmPulsedSHG3D nonlinear volume hologram134
    SBN800 nm180 fs76 MHzDomain inversion810 nmPulsedSHGNonlinear detour phase holography89
    Table 4. Summary of the latest results for nonlinear holography in femtosecond-laser-written NPCs.
    Application fieldsMaterial platformsStructure designModel dimensionalityHermitian/non-HermitianExcitation sourcesRef.
    Topological photonicsFused silicaTime-varying2DHermitianLaser beam (633 nm)161
    Fused silicaTime-varying3DLaser beam (633 nm)175
    BorosilicateTime-invariant2DLaser beam (720 nm)180
    Non-Hermitian photonicsFused silica“Wiggling” waveguides1DNon-HermitianLaser beam (633 nm)192
    Fused silicaArtificial scatterers2DLaser beam (633 nm)191
    Borosilicate“Intermittent” waveguides2DLaser beam (635 nm)195
    Quantum photonicsBorosilicateTime-varying1DHermitianSingle-photon (808 nm)214
    Fused silicaTime-invariant2DPhotons (810 nm)207
    Table 5. Summary of typical photonic applications of femtosecond-laser-written waveguide arrays.
    Bin Zhang, Wenchao Yan, Feng Chen, "Recent advances in femtosecond laser direct writing of three-dimensional periodic photonic structures in transparent materials," Adv. Photon. 7, 034002 (2025)
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