[1] C. M. Vest, Holographic Interferometry (Wiely, New York, 1992).

[2] U. Schnars and W. J¨uptner, Appl. Opt. 33, 179 (1994).

[3] L. Ma, H. Wang, Y. Li, and H. Jin, J. Opt. A: Pure Appl. Opt. 6, 396 (2004).

[4] A. Asundi and V. R. Singh, Meas. Sci. Technol. 17, 75 (2006).

[5] A. Asundi and V. R. Singh, Opt. Lett. 31, 2420 (2006).

[6] N. Maluf, An Introduction to Microelectromechanical Systems (Artech House, Boston, 2000).

[7] M. J. Madou, Fundamentals of Microfabrication (CRCPress, Boca Raton, 1998).

[8] A. Asundi and V. R. Singh, J. Holography Speckle 3, 103 (2006).

[9] L. Xu, X. Peng, J. Miao, and A. Asundi, Appl. Opt. 40, 5046 (2001).

[10] G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, Meas. Sci. Technol. 15, 529 (2004).

[11] V. R. Singh, J. Miao, Z. Wang, G. Hegde, and A. Asundi, Opt. Commun. 280, 285 (2007).

[12] L. Xu, J. Miao, and A. Asundi, Opt. Eng. 39, 3214 (2000).

[13] L. Xu, P. Z. Guo, M. Jianmin, and A. Asundi, Opt. Express 13, 2444 (2005).

[14] J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1996).

[15] U. Schnars and W. P. O. J¨uptner, Meas. Sci. Technol. 13, R85 (2002).

[16] R. L. Powell and K. A. Stetson, J. Opt. Soc. Am. 55, 1593 (1965).

[17] B. Jayaraman, N. Bhat, and R. Pratap, J. Micromech. Microeng. 19, 085006 (2009).

[18] A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

[19] P. Picart, J. Leval, D. Mounier, and S. Gougeon, Appl. Opt. 44, 337 (2005).