In-line digital holography for dynamic metrology of MEMS

[in Chinese] and [in Chinese]

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Vijay Raj Singh* and Anand Asundi

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DOI: 10.3788/COL20090712.1117 Cite this Article Set citation alerts

[in Chinese], [in Chinese]. In-line digital holography for dynamic metrology of MEMS[J]. Chinese Optics Letters, 2009, 7(12): 1117 Copy Citation Text

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[in Chinese], [in Chinese]. In-line digital holography for dynamic metrology of MEMS[J]. Chinese Optics Letters, 2009, 7(12): 1117

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