Etching study of micro-cavity with flexible film of novel infrared detector

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 32 >Issue 6 >Page 651 > Article

Infrared and Laser Engineering
Vol. 32, Issue 6, 651 (2003)

Etching study of micro-cavity with flexible film of novel infrared detector

[in Chinese]^*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Etching study of micro-cavity with flexible film of novel infrared detector[J]. Infrared and Laser Engineering, 2003, 32(6): 651 Copy Citation Text

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