• Journal of Infrared and Millimeter Waves
  • Vol. 42, Issue 1, 8 (2023)
Yu-Rong CUI1、2, Yi ZHOU1、2、3、*, Min HUANG1, Fang-Fang WANG1, Zhi-Cheng XU1, Jia-Jia XU1, Jian-Xin CHEN1、2、3、**, and Li HE1
Author Affiliations
  • 1Key Laboratory of Infrared Imaging Materials and Detectors,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
  • 2University of Chinese Academy of Science,Beijing 100049,China
  • 3Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China
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    DOI: 10.11972/j.issn.1001-9014.2023.01.002 Cite this Article
    Yu-Rong CUI, Yi ZHOU, Min HUANG, Fang-Fang WANG, Zhi-Cheng XU, Jia-Jia XU, Jian-Xin CHEN, Li HE. Studies on the surface treatment of InAs/GaSb type-II super-lattice long-wave infrared detectors[J]. Journal of Infrared and Millimeter Waves, 2023, 42(1): 8 Copy Citation Text show less
    Schematic diagrams of InAs/GaSb superlattice detectors:(a)conventional structure device,(b)gate-‍controlled structure device
    Fig. 1. Schematic diagrams of InAs/GaSb superlattice detectors:(a)conventional structure device,(b)gate-‍controlled structure device
    I-V curve of varying area devices with(a)no treatment without annealing,(b)N2O treatment without annealing,(c)N2O treatment with annealing,and(d)pixels with a diameter of 200μm for samples No.1,No.2,and No.3
    Fig. 2. I-V curve of varying area devices with(a)no treatment without annealing,(b)N2O treatment without annealing,(c)N2O treatment with annealing,and(d)pixels with a diameter of 200μm for samples No.1,No.2,and No.3
    Relationship between R0A-1 and P/A of varying area device
    Fig. 3. Relationship between R0A-1 and P/A of varying area device
    The leakage current on the sidewall surface of samples No. 1 and No. 3(the ordinate of the main graph is a linear coordinate,and the ordinate of the upper right graph is a logarithmic coordinate)
    Fig. 4. The leakage current on the sidewall surface of samples No. 1 and No. 3(the ordinate of the main graph is a linear coordinate,and the ordinate of the upper right graph is a logarithmic coordinate)
    I-V curves under different gate voltages(a)Sample No. 1,(b)Sample No. 3
    Fig. 5. I-V curves under different gate voltages(a)Sample No. 1,(b)Sample No. 3
    Simulation of side-wall leakage current under 0 gate voltage(a)Sample No. 1,(b)Sample No. 3(the ordinate of the main picture is logarithmic coordinates,and the ordinate of the lower left picture is linear coordinates)
    Fig. 6. Simulation of side-wall leakage current under 0 gate voltage(a)Sample No. 1,(b)Sample No. 3(the ordinate of the main picture is logarithmic coordinates,and the ordinate of the lower left picture is linear coordinates)
    编号N2O处理退火处理器件结构
    第一组1200-500 μm VADA
    23 min200-500 μm VADA
    33 min250℃200-500 μm VADA
    第二组1-GD400 μm GD
    3-GD3 min250℃400μm GD
    Table 1. List of devices
    参数1号2号3号
    r0surface17.7 Ωcm64.1 Ωcm284.4 Ωcm
    Table 2. Surface resistivities obtained by simulation
    参数数值参数数值
    me0.03 m0M2∙me1×10-23∙m0(eV2∙cm3
    mh0.4 m0τgr1.5 ns
    μe1 000(cm2/Vs)Et0.03 eV
    μh100(cm2/Vs)Nt2×1015/cm3
    Table 3. Parts of parameters used in the dark current simulation
    参数1号3号
    rsurface17.9 Ωcm297.6 Ωcm
    Neff6.2×1016/ cm39.6×1016/ cm3
    Qs2.33×1011 cm-23.72×1011 cm-2
    Table 4. Surface parallel resistivities and surface charges obtained by simulation
    Yu-Rong CUI, Yi ZHOU, Min HUANG, Fang-Fang WANG, Zhi-Cheng XU, Jia-Jia XU, Jian-Xin CHEN, Li HE. Studies on the surface treatment of InAs/GaSb type-II super-lattice long-wave infrared detectors[J]. Journal of Infrared and Millimeter Waves, 2023, 42(1): 8
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