Output characteristic of electron-beam pumping XeCl excimer laser

Huang Chao; Yi Aiping; Qian Hang; An Xiaoxia; Li Gaopeng

doi:10.3788/irla201948.1005003

[1] Cui Jianfeng, Gao Tao, Zhang Yanan, et al. High efficiency and high peak power 351 nm quasi-continuous ultraviolet laser[J]. Infrared and Laser Engineering, 2017, 46(6): 0605004. (in Chinese)

[2] Meng Xinling, Tao Luqi, Liu Zhaolin, et al. A novel polishing technology for epoxy resin based on 355 nm UV laser[J]. Journal of Semiconductors, 2017, 38(5):056001.

[3] Tu Xiaobo, Chen Shuang, Su Tie, et al. Uncertainty analysis of OH concentration measurement by optical cavity ring down spectroscopy[J]. Infrared and Laser Engineering, 2017, 46(2): 0239002. (in Chinese)

[4] Liu Zheyi, Jiang You, Xiao Chunlei, et al. Elucidating the various multi-phosphorylation statuses of protein functional regions by 193 nm ultraviolet photodissociation[J]. Chinese Chemical Letters, 2018, 29(5): 694-698.

[5] Wang Xi, Li Zhiming, Xie Yuntao, et al. Characteristics of typical optical materials damaged by ultraviolet excimer laser[J]. Chinese Journal of Luminescence, 2018, 39(5): 692-698. (in Chinese)

[6] Gao Xiang, Qiu Rong, Zhou Guorui, et al. Effect of subsurface impurities of fused silica on laser induced damage probability[J]. Infrared and Laser Engineering, 2017, 46(4): 0406002. (in Chinese)

[7] Huang Chao, Zhao Xueqing, Yi Aiping, et al. Electron-beam pumping XeCl excimer laser and application[J]. High Power Laser and Particle Beams, 2015, 27(4): 041012. (in Chinese)

[8] Zvorykin V D, Lebo I G. Laser and target experiments on KrF GARPUN laser installation at FIAN[J]. Laser and Particle Beams, 1999, 17(1): 69-88.

[9] Obensch Ain S P, Bondner S E, Colom Bant D G, et al. The Nike KrF laser facility: performance and initial target experiments [J]. Physics of Plasmas, 1996, 3(5): 2098-2107.

[10] Zhao Xueqing, Liu Jingru, Yi Aiping, et al. Amplification of high power short pulse excimer laser with beam smoothing[J]. Optics and Precision Engineering, 2011, 19(2): 397-406. (in Chinese)

[11] Wang Dahui, Qian Hang, Zhao Xueqing, et al. Automatic alignment of multiplexed beams of excimer laser system based on fluorescence imaging [J]. Optics and Precision Engineering, 2015, 23(4): 949-955. (in Chinese)

[12] Shen Yanlong, Huang Ke, Ma Lianying, et al. Optical element stability of high power excimer laser MOPA system[J]. Chinese Journal of Optics, 2011, 4(1): 66-71. (in Chinese)